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Part Number Description Manufacturer Price & Lead Time
10-017012-002 LAM Research 10-017012-002 LAM Research 4420 Heartbeat PCB Board 810-017012-002 Rev. 3 Working LAM RESEARCH Request Quote
100997144 LAM Research 100997144 Lam Research 4420 MKS Angle Valve 839-13521-1 Rev.D working 100997144 no valve LAM RESEARCH Request Quote
11021-1-D-00332136 LAM Research 11021-1-D-00332136 Lam 4420 11021-1-D-00332136 Loadlock Chamber 853-012-123-001-I-DFT working LAM RESEARCH Request Quote
11200-3-E-00182139 LAM Research 11200-3-E-00182139 Lam 4420 11200-3-E-00182139 Loadlock Chamber 715-130080-008 working LAM RESEARCH Request Quote
11225-00 LAM Research 11225-00 LAM 4420 Etcher Anafaze Controller 11225-00 Rev.G Working LAM RESEARCH Request Quote
11230-00 LAM Research 11230-00 Lam 4420 Anafaze 11230-00 MLS Host Communication Board 11235-50 working LAM RESEARCH Request Quote
12123-1-C-01441057-R3 LAM Research 12123-1-C-01441057-R3 Lam Drive Arm Assy. 12123-1-C-01441057 working LAM RESEARCH Request Quote
12200-2-D-00302064 LAM Research 12200-2-D-00302064 LAM Etcher Inner Gate Valve Drive 12200-2-D-00302064 Removed From 4420 Working LAM RESEARCH Request Quote
12726-1-D-4991 LAM Research 12726-1-D-4991 Lam Research 4420 12726-1-D-4991 Wafer Transport Assembly working LAM RESEARCH Request Quote
13610-1-B-5149 LAM Research 13610-1-B-5149 LAM Research 13610-1-B-5149 Solenoid Tray Assembly missing PCB LAM 4420 used LAM RESEARCH Request Quote
15-024611-00 LAM Research 15-024611-00 Lam Research Transfer Arm 15-024611-00 Rev. C Used Working LAM RESEARCH Request Quote
17620-1-A-4318 LAM Research 17620-1-A-4318 Lam 4420 Tri-Convectron Interface Assembly 17620-1-A-4318 Used Working LAM RESEARCH Request Quote
2080 TCU Lam Research 2080 TCU Lam Research 2080 TCU Temperature Control Unit 852-11098-020-B-6882 working LAM RESEARCH Request Quote
2300 Exelan Lam 2300 Exelan Etcher | Key Semiconductor Equipment LAM RESEARCH Request Quote
2300 Versys Lam 2300 Versys Etcher | Key Semiconductor Equipment LAM RESEARCH Request Quote
272072-00 LAM Research 272072-00 Lam 4420 SRAM Board 70113-003 Rev.K working LAM RESEARCH Request Quote
28-8875-027 LAM Research 28-8875-027 LAM PCB Comm. Board 28-8875-027 LAM RESEARCH Request Quote
28-8875-036 LAM Research 28-8875-036 LAM Research Opto Output PCB 28-8875-036 New LAM RESEARCH Request Quote
28-8875-037 LAM Research 28-8875-037 LAM Research Opto Input Board 28-8875-037 Rev. D New LAM RESEARCH Request Quote
310-170314 LAM Research 310-170314 LAM Research LAM 9100 ADIO-A0 Control Board 310-170314 Rev. A Working LAM RESEARCH Request Quote
320665100 LAM Research 320665100 LAM Research Timing Belt 320665100 Lot of 4 New LAM RESEARCH Request Quote
392A LAM Research Printed Circuit Board LAM RESEARCH Request Quote
413-054-00-2-0 LAM Research 413-054-00-2-0 Lam Focus Ring (outer) 413-054-00-2-0 New LAM RESEARCH Request Quote
4420 839-013514-001 LAM Research 4420 839-013514-001 LAM Research 4420 839-013514-001 Weldment, Exit Load Lock Vacuum Man. working LAM RESEARCH Request Quote
4700 series Metal Etch System LAM RESEARCH Request Quote
474-1-C-677-385 LAM Research 474-1-C-677-385 Lam Etcher 490 590 Motor PCB 474-1-C-677-385 055252 LAM RESEARCH Request Quote
490 PolySilicon Etch System LAM RESEARCH Request Quote
490 B Autoetch LAM RESEARCH Request Quote
515-011835-001 LAM Research 515-011835-001 LAM Research Leveling Electrode 515-011835-001 new LAM RESEARCH Request Quote
53-012350-002-H-230 LAM Research 53-012350-002-H-230 LAM 4420 Etcher Outer Gate Assembly 853-012350-002-H-230 Working LAM RESEARCH Request Quote
55258 LAM Research 55258 LAM Etcher 490 590 PCB 055258 017-018-0390 LAM RESEARCH Request Quote
638-099530-001 LAM Research 638-099530-001 LAM Transformer 638-099530-001 new LAM RESEARCH Request Quote
673D LAM Research Printed Circuit Board LAM RESEARCH Request Quote
676-00504-003 LAM Research 676-00504-003 Lam Etcher Motor Pitman Gap Adjust 676-00504-003 LAM RESEARCH Request Quote
678-099744-004 LAM Research 678-099744-004 LAM Immersion Heater 678-099744-004 new LAM RESEARCH Request Quote
678-099744-005 LAM Research 678-099744-005 LAM Research Immersion Heater 678-099744-005 new LAM RESEARCH Request Quote
678-099744-006 LAM Research 678-099744-006 LAM Immersion Heater 678-099744-006 new LAM RESEARCH Request Quote
678-801541-002 LAM Research 678-801541-002 LAM Immersion Heater 678-801541-002 new LAM RESEARCH Request Quote
678-801541-003 LAM Research 678-801541-003 LAM Immersion Heater 678-801541-003 new LAM RESEARCH Request Quote
678-801542-001 Lam Research 678-801542-001 LAM Heat Tape 678-801542-001 new LAM RESEARCH Request Quote
690 #25 Autoetcher 690 Metal etcher LAM RESEARCH Request Quote
70110-003 Lam Research 70110-003 Lam Research 4420 SRAM PCB 70110-003 working LAM RESEARCH Request Quote
710-7930-1 LAM Research 710-7930-1 Lam Etcher 490 590 Lam PCB 710-7930-1 Rev C LAM RESEARCH Request Quote
713-011205-001 LAM Research 713-011205-001 LAM 180 Degree Loadlock Cover 713-011205-001 Rev. F Working LAM 4420 LAM RESEARCH Request Quote
713-013220-001 LAM Research 713-013220-001 LAM Outer Gate Entrance Safety Cover 713-013220-001 Working LAM 4420 LAM RESEARCH Request Quote
713-013236-001 LAM Research 713-013236-001 LAM Outer Gate Exit Safety Cover 713-013236-001 Working LAM 4420 LAM RESEARCH Request Quote
713-013236-01 LAM Research 713-013236-01 Lam Research 4420 Outer Gate Exit Safety Cover 713-013236-01 Lot of 3 Used LAM RESEARCH Request Quote
713-11203-1 LAM Research 713-11203-1 Lam Research 4420 90 Degree Load Lock Cover 713-11203-1 Rev. D Used Working LAM RESEARCH Request Quote
713-21816-1 LAM Research 713-21816-1 Lam Research Blank Cover 713-21816-1 Rev.B LAM RESEARCH Request Quote
714-013218-001 LAM Research 714-013218-001 LAM 4420 Left & Center RF Cover Plate 714-013218-001 Lot (4) 714-013219-001 LAM RESEARCH Request Quote
714-013234-001 LAM Research 714-013234-001 LAM 4420 Manometer Cover Box 714-013234-001 Rev. C Working LAM RESEARCH Request Quote
715-011035-001-D LAM Research 715-011035-001-D Lam 4420 Lower End Reaction Chamber Plate 715-011035-001-D working 715-11059-1 LAM RESEARCH Request Quote
715-011532-001 LAM Research 715-011532-001 Lam 4420 Upper Electrode Plate Seal 715-011532-001 Rev.D working LAM RESEARCH Request Quote
715-011626-001 Lam Research 715-011626-001 Lam Cooling Lower Electrode Ring 715-011626-001 LAM RESEARCH Request Quote
715-011825-001 LAM Research 715-011825-001 Lam Lower End Plate 6"" 715-011825-001 new LAM RESEARCH Request Quote
715-011902-001 LAM Research 715-011902-001 Lam Research Upper Baffle Plate 715-011902-001 new LAM RESEARCH Request Quote
715-011912-083 LAM Research 715-011912-083 LAM Research Upper Baffle Plate 8.3"" 715-011912-083 Lot of 2 New LAM RESEARCH Request Quote
715-011913-083 LAM Research 715-011913-083 LAM Research Lower Baffle Plate 8.3"" 715-011913-083 Lot of 2 New LAM RESEARCH Request Quote
715-028615-001 LAM Research 715-028615-001 LAM Research Upper Baffle Plate 8"" 715-028615-001 New LAM RESEARCH Request Quote
715-11626-001 LAM Research 715-11626-001 Lam Cooling Electrode Ring 715-11626-001 new LAM RESEARCH Request Quote
715-12165-8 LAM Research 715-12165-8 LAM Research 200mm End Effector 715-12165-8 B Working LAM 4420 LAM RESEARCH Request Quote
715-130080-008 LAM Research 715-130080-008 LAM 4420 200mm End Effector 715-130080-008 Rev. BC Working 32-75-97-52-026 LAM RESEARCH Request Quote
715-130080-008 REV.F LAM Research 715-130080-008 REV.F LAM Research 715-130080-008 200mm End Effector REV. F LAM 4500 Used Working LAM RESEARCH Request Quote
715-130092-008 LAM Research 715-130092-008 LAM Research 200mm End Effector 715-130092-008 Rev. 2 Working LAM 4420 LAM RESEARCH Request Quote
715-130092-008 REV.B LAM Research 715-130092-008 REV.B LAM Research 715-130092-008 200mm End Effector REV. B LAM 4500 Used Working LAM RESEARCH Request Quote
715-140184-008 LAM Research 715-140184-008 LAM 4420 Etcher 853-012123-001-G-230S Harmonic Arm Drive Assy 715-140184-008 LAM RESEARCH Request Quote
715-140184-008-E1 LAM Research 715-140184-008-E1 Lam 200mm 4420 End Effector 715-140184-008-E1 working LAM RESEARCH Request Quote
715-140287-002 LAM Research 715-140287-002 Lam Clamp Ring Upper Electrode 715-140287-002 new LAM RESEARCH Request Quote
716-011057-002 LAM Research 716-011057-002 Lam Research 716-011057-002 Upper Alumina Filler Ring new LAM RESEARCH Request Quote
716-011505-001 LAM Research 716-011505-001 LAM Research 7.98"" Diffuser Disc 716-011505-001 New LAM RESEARCH Request Quote
716-011623-001 LAM Research 716-011623-001 Lam 4420 Lower Ring Clamp 716-011623-001 Rev.C working LAM RESEARCH Request Quote
716-011651-006 Lam Research 716-011651-006 Lam Ring Edge Wafer Clamp 6.00 716-011651-006 New LAM RESEARCH Request Quote
716-028123-003 LAM Research 716-028123-003 LAM 716-028123-003 High Cond Filler Ring New LAM RESEARCH Request Quote
716-140069-001 Lam Research 716-140069-001 Lam Plate Upper Insulator ESC 716-140069-001 new LAM RESEARCH Request Quote
716-140427-001 LAM Research 716-140427-001 Lam Ring Hot Edge 15deg 716-140427-001 new LAM RESEARCH Request Quote
716-330190-081 LAM Research 716-330190-081 LAM Focus Ring 8"" ESC 716-330190-081 New LAM RESEARCH Request Quote
740-0035-01 LAM Research 740-0035-01 Lam Research 740-0035-01 G8 Graphite Gasket pair new LAM RESEARCH Request Quote
76-267811-00 Lam Research 76-267811-00. *Internal part number* | Custom made to size | DB15 LAM RESEARCH Request Quote
76-283661-00 Lam Research 76-283661-00. *Internal part number* | Custom made to size LAM RESEARCH Request Quote
766-004254-003 LAM Research 766-004254-003 LAM 6 Station Pneumatic Manifold 766-004254-003 new LAM RESEARCH Request Quote
766-020032-001 Lam Research 766-020032-001 Lam Etcher Chem Sply Valve Block 766-020032-001 new LAM RESEARCH Request Quote
771-090453-001 LAM Research 771-090453-001 LAM Research 4420 771-090453-001 Convectron Gauge, Tube Vacuum Gauges/L.L. Equip LAM RESEARCH Request Quote
796-006238-001 LAM Research 796-006238-001 Lam 4420 Tylan AdapTorr AC-2 Rev.H Valve Controller 796-006238-001 Rev.G working LAM RESEARCH Request Quote
796-6238-002 LAM Research 796-6238-002 Lam 4420 Tylan AC-2S06 Valve Controller 796-6238-002 Rev.B working LAM RESEARCH Request Quote
810-017003-004 LAM Research 810-017003-004 Lam Research 4420 DIP High Frequency Board 810-017003-004 Rev. B Used Working LAM RESEARCH Request Quote
810-017003-005B LAM Research H/F DIP Board LAM RESEARCH Request Quote
810-017004-001 LAM Research 810-017004-001 Lam 4420 Solenoid Interlock PCB 810-017004-001 Rev.E working LAM RESEARCH Request Quote
810-017006-001 LAM Research 810-017006-001 Lam 4420 Temperature Sensor Board 810-017006-001 Rev.E working LAM RESEARCH Request Quote
810-017007-001 LAM Research 810-017007-001 Lam Research 4420 Convectron Tube Interface 810-017007-001 Rev. B Lot of 2 Used LAM RESEARCH Request Quote
810-017012-001 LAM Research 810-017012-001 Lam Heartbeat Board 810-017012-001 working LAM RESEARCH Request Quote
810-017013 LAM Research 810-017013 Lam Research 4420 810-017013 Gap Drive Amp Interlock Board Rev.F working LAM RESEARCH Request Quote
810-017016-001 Lam Research 810-017016-001 LAM PCB Stepper Motor Driver Board Assy. 810-017016-001 new LAM RESEARCH Request Quote
810-017016-1 LAM Research 810-017016-1 LAM Research 4420 Stepper Motor Driver Board 810-017016-1 Rev. B Working LAM RESEARCH Request Quote
810-017031-2 LAM Research 810-017031-2 LAM Research 4420 ADIO PCB Board 810-017031-2 Rev. 2 Working LAM RESEARCH Request Quote
810-017031-R4 LAM Research 810-017031-R4 LAM Research 4420 ADIO PCB Board 810-017031-R4 Rev. 1 Working LAM RESEARCH Request Quote
810-017038-002.B LAM Research 810-017038-002.B LAM Serial I/O-2 PCB SYS68K/SIO-2 810-017038-002.B LAM RESEARCH Request Quote
810-017093R001 LAM Research 810-017093R001 Lam Research 810-017093R001 Gapmotor Controller PCB Assembly RevA 810-017093-001 LAM RESEARCH Request Quote
810-02432R LAM Research 810-02432R Lam Plate Focus Ring Adapter Cera-R 810-02432R LAM RESEARCH Request Quote
810-02433R LAM Research 810-02433R Lam Plate, Cool GDP 10 Hole 810-02433R LAM RESEARCH Request Quote
810-02460R LAM Research 810-02460R Lam Liner Extendedheated Ceramic 810-02460R LAM RESEARCH Request Quote
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