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Part Number Description Manufacturer Price & Lead Time
810-034806-105B LAM Research Printed Circuit Board LAM RESEARCH Request Quote
810-15987-001 LAM Research Printed Circuit Board LAM RESEARCH Request Quote
810-17002-001 LAM Research 810-17002-001 Lam 4420 16 Ch. Heat/Cool PCB 810-17002-001 Rev. B Used Working LAM RESEARCH Request Quote
810-17002-001 Rev. D Lam Research 810-17002-001 Rev. D LAM Research I/O Breakout Board 810-17002-001 Rev. D Used Working LAM RESEARCH Request Quote
810-17004-001 LAM Research 810-17004-001 LAM Research 810-17004-001 Rev. F Solenoid Interlock Board LAM 4420 Used Working LAM RESEARCH Request Quote
810-17004-004 LAM Research 810-17004-004 Lam 4420 Solenoid Interlock Board 810-17004-004 Rev. C Used Working LAM RESEARCH Request Quote
810-17006-1 LAM Research 810-17006-1 Lam 4420 Temperature Sensor Board 810-17006-1 Rev.B working LAM RESEARCH Request Quote
810-17012-001 Rev. D Lam Research 810-17012-001 Rev. D Lam Research 4420 Heartbeat Board 810-17012-001 Rev. D Used Working LAM RESEARCH Request Quote
810-17012-002 LAM Research 810-17012-002 LAM Research 4420 Heartbeat PCB 810-17012-002 Rev.2 Used Working LAM RESEARCH Request Quote
810-17012-002 Rev. 3 Lam Research 810-17012-002 Rev. 3 Lam Research 4420 Heartbeat PCB 810-17012-002 Rev. 3 Used Working LAM RESEARCH Request Quote
810-17013-001 Rev. D Lam Research 810-17013-001 Rev. D Lam Research Gap Drive Amp Board 810-17013-001 Rev. D Used Working LAM RESEARCH Request Quote
810-17016-001 LAM Research 810-17016-001 LAM 4420 Etcher Stepper Motor Driver Bd 810-17016-001 LAM RESEARCH Request Quote
810-17016-001 Rev. C LAM Research 810-17016-001 Rev. C Lam Research 4420 Stepper Motor Driver Board 810-17016-001 Rev. C Used Working LAM RESEARCH Request Quote
810-17016-001 Rev. D Lam Research 810-17016-001 Rev. D Lam Research 4420 Stepper Motor Driver 810-17016-001 Rev. D Lot of 7 Used LAM RESEARCH Request Quote
810-17016-001 Rev. E LAM Research 810-17016-001 Rev. E LAM Research Stepper Motor Driver 810-17016-001 Rev. E Used Working LAM RESEARCH Request Quote
810-17016-1 LAM Research 810-17016-1 Lam Research 4420 Stepper Motor Driver 810-17016-1 Rev. B Lot of 7 Used LAM RESEARCH Request Quote
810-17016-1/A1 LAM Research Driver Board LAM RESEARCH Request Quote
810-17018-002 LAM Research 810-17018-002 Lam 4400 Gap Motor Control Board 810-17018-002 working LAM RESEARCH Request Quote
810-17018-002 Rev. G LAM Research 810-17018-002 Rev. G LAM Research Gap Motor Controller Board 810-17018-002 Rev. G Used Working LAM RESEARCH Request Quote
810-17018-002 Rev. H LAM Research 810-17018-002 Rev. H LAM Research Gap Motor Controller Board 810-17018-002 Rev. H Used Working LAM RESEARCH Request Quote
810-17031-004 LAM Research 810-17031-004 LAM Research LAM 9100 ADIO-A0 Control Board 810-17031-004 Rev. 1 Working LAM RESEARCH Request Quote
810-17031-2 LAM Research 810-17031-2 Lam 4420 ADIO-A0 Control Board 810-17031-2 working LAM RESEARCH Request Quote
810-17031-3 LAM Research 810-17031-3 Lam 4420 ADIO-AO PCB 810-17031-3 Rev. I Used Working LAM RESEARCH Request Quote
810-17031-3 Rev. 2 LAM Research 810-17031-3 Rev. 2 Lam Research 4420 ADIO-AO Control Board 810-17031-3 Rev. 2 Used Working LAM RESEARCH Request Quote
810-17031-3/2 LAM Research I/O Board LAM RESEARCH Request Quote
810-17031-4 LAM Research 810-17031-4 Lam Research 4420 ADIO A0 PCB 810-17031-4 Rev. 2 Used Working LAM RESEARCH Request Quote
810-17031R4 LAM Research 810-17031R4 LAM Research LAM 9100 ADIO-A0 Control Board 810-17031R4 Rev. 1 Working LAM RESEARCH Request Quote
810-17031-R4 Rev. 1 LAM Research 810-17031-R4 Rev. 1 LAM Research 4420 ADIO-AO Control Board 810-17031-R4 Rev. 1 Used Working LAM RESEARCH Request Quote
810-17041 LAM Research 810-17041 LAM 810-17041 PCB Brushless Motor Driver-Speed Control Board LAM RESEARCH Request Quote
810-17082-001 LAM Research 810-17082-001 LAM 4420 Etcher 16 Channel Heat/Cool PCB 810-17082-001 Rev.B working LAM RESEARCH Request Quote
810-370845-001A LAM Research Interlock Board LAM RESEARCH Request Quote
810-392-1 Lam Research 810-392-1 Lam Research Etcher 490 590 PCB 810-392-1 PCB working LAM RESEARCH Request Quote
810-503-3 LAM Research 810-503-3 Lam Etcher 490 590 PCB 055237 810-503-3 rev B LAM RESEARCH Request Quote
810-8566-1 LAM Research 810-8566-1 Lam Research Motor Driver Board 810-8566-1 Rev.D working LAM RESEARCH Request Quote
811-02493R LAM Research 811-02493R Lam Cover Elctd Hsgesc 811-02493R working LAM RESEARCH Request Quote
839-011237-001-A LAM Research 839-011237-001-A Lam Research 4420 L.L. Gauge Vacuum Weldmount 839-011237-001-A Lot of 2 Used LAM RESEARCH Request Quote
839-011237-001-D LAM Research 839-011237-001-D Lam 4420 839-011237-001-D L.L. Gauge Vacuum Weldment Assembly lot of 2 working LAM RESEARCH Request Quote
839-011237-1 LAM Research 839-011237-1 Lam Research 4420 L.L. Gauge Vacuum Weldmount 839-011237-1 Rev. 1 Lot of 8 Used LAM RESEARCH Request Quote
839-011516-001 LAM Research 839-011516-001 LAM Research 4420 Upper Chamber Assembly Parts 839-011516-001 working LAM RESEARCH Request Quote
839-011516-001-B 713-011517-001 LAM Research 839-011516-001-B 713-011517-001 Lam 4420 Weldment Standoff Gas Feed 839-011516-001-B Lot 713-011517-001 LAM RESEARCH Request Quote
839-013513-001 LAM Research 839-013513-001 LAM Research 4420 839-013513-001 Weldment, Entrance L.L. Vacuum Manifold working LAM RESEARCH Request Quote
839-013514-001 839-013513-001 LAM Research 839-013514-001 839-013513-001 Lam Research 4420 Weldmount Loadlock 839-013514-001 839-013513-001 Lot of 4 U... LAM RESEARCH Request Quote
839-013515-001-B LAM Research 839-013515-001-B Lam Research 4420 Weldmount Loadlock INT 839-013515-001-B Lot of 8 Used Working LAM RESEARCH Request Quote
839-013521-001 LAM Research 839-013521-001 LAM Research 1-1/2"" Isolation Valve 839-013521-001 Working LAM 4420 LAM RESEARCH Request Quote
839-024453-100 LAM Research 839-024453-100 LAM Weldment Vacline Cooling Assembly 839-024453-100 Rev. D Working LAM 4420 LAM RESEARCH Request Quote
839-024453-100-A LAM Research 839-024453-100-A Lam Research 4420 839-024453-100-A Weldment Vacline Assembly working LAM RESEARCH Request Quote
839-029227-100 LAM Research 839-029227-100 LAM Weldment He Line Manometer Adapter 839-029227-100 Rev. C Working LAM 4420 LAM RESEARCH Request Quote
839-13510-1 LAM Research 839-13510-1 Lam 4420 MKS 839-13510-1 Angle Valve Assembly 853-013575-002 working LAM RESEARCH Request Quote
839-440462-336 LAM Research 839-440462-336 LAM Research 6"" Electrostatic Chuck 839-440462-336 Rev. B New LAM RESEARCH Request Quote
852-010030-001 LAM Research 852-010030-001 LAM Research 4420 Main Frame Assembly 852-010030-001 working LAM RESEARCH Request Quote
852-011060-503-A LAM Research 852-011060-503-A Lam 4420 Upper Chamber Gap Housing Assy. 852-011060-503-A 715-011005-001 working LAM RESEARCH Request Quote
852-011060-503-D-CHMAIN LAM Research 852-011060-503-D-CHMAIN Lam 4420 Upper Chamber Gap Housing Assy. 852-011060-503-D-CHMAIN working LAM RESEARCH Request Quote
852-011061-103 LAM Research 852-011061-103 Lam Research 4420 852-011061-103 Lower Chamber Assembly 853-025103-003 as-is LAM RESEARCH Request Quote
852-011061-503-B-CA8CH LAM Research 852-011061-503-B-CA8CH Lam 4420 852-011061-503-B-CA8CH Reaction Chamber Assembly untested as-is LAM RESEARCH Request Quote
852-011061-503-C-CHMAIN LAM Research 852-011061-503-C-CHMAIN Lam 4420 852-011061-503-C-CHMAIN Reaction Chamber Assembly untested as-is LAM RESEARCH Request Quote
852-011061-503-E1-231 LAM Research 852-011061-503-E1-231 Lam 4420 Etch Lower Chamber 852-011061-503-E1-231 200mm LAM RESEARCH Request Quote
852-011061-506 LAM Research 852-011061-506 Lam 4420 852-011061-506 Reaction Chamber Assembly untested as-is LAM RESEARCH Request Quote
852-011200-003 LAM Research 852-011200-003 LAM 4420 Etcher 852-011200-003 Rev.J Entrance Loadlock Assembly 853-012123-001 LAM RESEARCH Request Quote
852-011200-003-F LAM Research 852-011200-003-F LAM 4420 Etcher 852-011200-003-F-231 Entrance Loadlock 853-012123-001-E-230S LAM RESEARCH Request Quote
852-011200-003-L-230S LAM Research 852-011200-003-L-230S Lam 4420 852-011200-003-L-230S Harmonic Arm Drive Chamber 853-012123-001-G used LAM RESEARCH Request Quote
852-011200-500 LAM Research 852-011200-500 LAM 4420 Etcher 852-011200-500 Rev.D Entrance Loadlock Assembly 853-012123-500 LAM RESEARCH Request Quote
852-011200-583 LAM Research 852-011200-583 LAM 4420 Etcher 852-011200-583 Rev.3 Entrance Loadlock Assembly 853-012123-001 LAM RESEARCH Request Quote
852-011200-583-A-LL MAIN LAM Research 852-011200-583-A-LL MAIN Lam 4420 Etcher Exit Loadlock Assy 852-011200-583-A-LLMAIN 853-017637-001-I LAM RESEARCH Request Quote
852-011201-001 LAM Research 852-011201-001 LAM 4420 Etcher 852-011201-001 Exit Loadlock Assembly Rev.G 853-012123-001 Rev.E LAM RESEARCH Request Quote
852-011201-001-D LAM Research 852-011201-001-D LAM Research 4420 852-011201-001-D 853-017637-002 Harmonic Arm Drive Assembly LAM RESEARCH Request Quote
852-011201-001-E-231 LAM Research 852-011201-001-E-231 Lam 4420 852-011201-001-E-231 Harmonic Arm Drive Chamber 853-012123-001-E-230 LAM RESEARCH Request Quote
852-011201-001-L-230 LAM Research 852-011201-001-L-230 Lam 4420 852-011201-001-L-230 Harmonic Arm Drive Chamber 853-012123-001-G-2300 LAM RESEARCH Request Quote
852-011201-500 LAM Research 852-011201-500 LAM 4420 Etcher 852-011201-500 Rev.E Exit Loadlock Assembly 853-012123-500 Rev.D LAM RESEARCH Request Quote
852-011201-581 LAM Research 852-011201-581 LAM 4420 Etcher 852-011201-001 Rev.J Exit Loadlock Assembly 853-012123-001 Rev.G LAM RESEARCH Request Quote
852-011201-581-E1-230 LAM Research 852-011201-581-E1-230 LAM Research 4420 852-011201-581-E1-230 Exit Loadlock Bottom View Assembly as-is LAM RESEARCH Request Quote
852-011201-583 LAM Research 852-011201-583 LAM 4420 Etcher 852-011201-583 Rev.3 Exit Loadlock Assembly 853-012123-001 Rev.I LAM RESEARCH Request Quote
852-011201-583-A-LLMAIN LAM Research 852-011201-583-A-LLMAIN Lam 4420 852-011201-583-A-LLMAIN Harmonic Arm Drive Chamber 853-012123-001-I-LL LAM RESEARCH Request Quote
852-0112200-003-E LAM Research 852-0112200-003-E LAM Research 4420 852-0112200-003-E 853-012123-001-G-230S Harmonic Arm Drive LAM RESEARCH Request Quote
852-0112200-500-E1-230D LAM Research 852-0112200-500-E1-230D LAM Research 4420 852-0112200-500-E1-230D 853-012123-500-E1-230 Harmonic Arm LAM RESEARCH Request Quote
852-014681-005 LAM Research 852-014681-005 Lam Research RF Generator Cart 852-014681-005 untested LAM RESEARCH Request Quote
852-014681-005-F LAM Research 852-014681-005-F LAM Research 4420 RF Generator Cart 852-014681-005-F working OEM-650A LAM RESEARCH Request Quote
852-014681-005-J LAM Research 852-014681-005-J LAM Research 4420 RF Generator Cart 852-014681-005-J working OEM-650A LAM RESEARCH Request Quote
852-014681-005-K LAM Research 852-014681-005-K Lam RF Generator Cart 852-014681-005-K untested LAM RESEARCH Request Quote
852-014681-583/ 851-014680-583 LAM Research 852-014681-583/ 851-014680-583 Lam Research 852-014681-583 RF Cart 851-014680-583 no Generator included as-... LAM RESEARCH Request Quote
852-017152-003 LAM Research 852-017152-003 LAM Research Front EMO Box Assembly 852-017152-003 Rev. G Working LAM 4420 LAM RESEARCH Request Quote
852-017350-002 LAM Research 852-017350-002 LAM Research 4420 Gap Drive Control Assembly 852-017350-002 working LAM RESEARCH Request Quote
852-017350-003-3-C508 LAM Research 852-017350-003-3-C508 LAM Research 4420 Gap Drive Control Assembly 852-017350-003-3-C508 working LAM RESEARCH Request Quote
852-017500-001 LAM Research 852-017500-001 LAM Research 4420 852-017500-001 CRT-Keypanel Chassis Assembly working LAM RESEARCH Request Quote
852-017500-001-D LAM Research 852-017500-001-D Lam 4420 Etcher 852-017500-001-D CRT Keypanel Chassis minor damage working LAM RESEARCH Request Quote
852-017500-003-4 LAM Research 852-017500-003-4 LAM 4420 Etcher 852-017500-003-4 CRT-Keypanel Chassis Assembly 853-017505-001-C LAM RESEARCH Request Quote
852-017500-003-6-C220 LAM Research 852-017500-003-6-C220 LAM Research 4420 852-017500-003-6-C220 CRT-Keypanel Chassis Assembly working LAM RESEARCH Request Quote
852-017500-003-B-LEAN LAM Research 852-017500-003-B-LEAN Lam 4420 Etcher CRT Keypanel Chassis 852-017500-003-B-LEAN working LAM RESEARCH Request Quote
852-017500-003-C-LEAN Lam Research 852-017500-003-C-LEAN Lam Research 852-017500-003-C-LEAN CRT Keypanel Chassis Lam 4420 Etcher working LAM RESEARCH Request Quote
852-017500-003-C-LFAW LAM Research 852-017500-003-C-LFAW Lam 4420 Etcher CRT Keypanel Chassis Assembly 852-017500-003-C-LFAW Used Working LAM RESEARCH Request Quote
852-017500-103-A-220 LAM Research 852-017500-103-A-220 LAM Research 4420 CRT-Keypanel Chassis Assembly 852-017500-103-A-220 working LAM RESEARCH Request Quote
852-110198-001-B-6882 LAM Research 852-110198-001-B-6882 Lam 2080 TCU 852-110198-001-B-6882 10,767.63 Used Not Working LAM RESEARCH Request Quote
853-001983-001N LAM Research Photoeye LAM RESEARCH Request Quote
853-001983-005-H-PCBELE LAM Research 853-001983-005-H-PCBELE Lam Research 4420 Endpoint Detector 853-001983-005-H-PCBELE Used Working LAM RESEARCH Request Quote
853-001983-005RP-1367 LAM Research 853-001983-005RP-1367 Lam Research 4420 Endpoint Detector 853-001983-005RP-1367 Used Working LAM RESEARCH Request Quote
853-001983-010 Rev. R LAM Research 853-001983-010 Rev. R Lam Research 4420 Endpoint Detector 853-001983-010 Rev. R Used Working LAM RESEARCH Request Quote
853-002900-010 LAM Research 853-002900-010 Lam RF Cable Assy. 853-002900-010 new LAM RESEARCH Request Quote
853-011053-503-A-CHMFDR Lam Research 853-011053-503-A-CHMFDR Lam Research 4420 853-011053-503-A-CHMFDR Manometer Sensor Assembly lot of 3 LAM RESEARCH Request Quote
853-011117-001 LAM Research 853-011117-001 Lam 4420 Gap Heating Assembly 853-011117-001 working LAM RESEARCH Request Quote
853-011142-001 LAM Research 853-011142-001 Lam 4420 RF Gap Motor 853-011142-001 used 853-011168-500-1-MDFT 41-M2901 LAM RESEARCH Request Quote
853-011661-001-H LAM Research 853-011661-001-H Lam 4420 Pedestal Cylinder Lifter Assy 853-011661-001-H working 853-011632-001 LAM RESEARCH Request Quote
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