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Part Number Description Manufacturer Price & Lead Time
853-012095-008 LAM Research 853-012095-008 Lam 200mm End Effector 853-012095-008 new LAM RESEARCH Request Quote
853-012123-001-E LAM Research 853-012123-001-E LAM 4420 Input Arm & Driver 853-012123-001 Working LAM RESEARCH Request Quote
853-012123-001-E-230S LAM Research 853-012123-001-E-230S LAM Research 4420 Etcher 853-012123-001-E-230S Harmonic Arm Drive Assembly used LAM RESEARCH Request Quote
853-012123-001-F-230S LAM Research 853-012123-001-F-230S LAM Research 853-012123-001-F-230S Harmonic Arm Drive LAM 4420 Working No Arm LAM RESEARCH Request Quote
853-012123-001-G-230 LAM Research 853-012123-001-G-230 LAM Research 4420 Etcher 853-012123-001-G-230 Harmonic Arm Drive Assembly used LAM RESEARCH Request Quote
853-012123-001-G-230S LAM Research 853-012123-001-G-230S LAM 4420 Chamber Robot 853-012123-001-G-230S working LAM RESEARCH Request Quote
853-012123-001-I-LLFDR LAM Research 853-012123-001-I-LLFDR LAM Research 853-012123-001-I-LLFDR Harmonic Arm Drive LAM 4420 Used Working LAM RESEARCH Request Quote
853-012123R001 REV.I LAM Research 853-012123R001 REV.I LAM Research 853-012123R001 REV.I Harmonic Arm Drive LAM 4420 Used Working LAM RESEARCH Request Quote
853-012176-008 LAM Research 853-012176-008 Lam 150mm Wafer End Effector 853-012176-008 new LAM RESEARCH Request Quote
853-012200-002 LAM Research 853-012200-002 LAM 4420 Etcher 853-012200-002 Inner Gate Valve Drive working LAM RESEARCH Request Quote
853-012200-002-G LAM Research 853-012200-002-G LAM Research 853-012200-002-G LAM 4420 Inner Gate Valve Assembly Used Working LAM RESEARCH Request Quote
853-012200-002-G-230S LAM Research 853-012200-002-G-230S LAM 4420 Etcher Inner Gate Valve Drive 853-012200-002-G-230S Working LAM RESEARCH Request Quote
853-012200-002-G-VAC LAM Research 853-012200-002-G-VAC LAM 4420 Etcher Inner Gate Valve Drive 853-012200-002-G-VAC Working LAM RESEARCH Request Quote
853-012200-002-H-DFT LAM Research 853-012200-002-H-DFT LAM 4420 Etcher Inner Gate Valve Drive 853-012200-002-H-DFT Working LAM RESEARCH Request Quote
853-012200-002-J-VAC LAM Research 853-012200-002-J-VAC LAM 4420 Etcher Inner Gate Valve Drive 853-012200-002-J-VAC Working LAM RESEARCH Request Quote
853-01220-002-G-230D LAM Research 853-01220-002-G-230D LAM 4420 Etcher Inner Gate Valve Drive 853-01220-002-G-230D Working LAM RESEARCH Request Quote
853-01220-002-H-230S LAM Research 853-01220-002-H-230S LAM Etcher Inner Gate Valve Drive 853-01220-002-H-230S Removed From 4420 Working LAM RESEARCH Request Quote
853-012261-001-4-230 LAM Research 853-012261-001-4-230 LAM Research 4420 Inner Gate Assembly 853-012261-001-4-230 working 853-12230-002 LAM RESEARCH Request Quote
853-012350-002 LAM Research 853-012350-002 LAM 4420 Etcher Outer Gate Assembly 853-012350-002 Rev. H Working LAM RESEARCH Request Quote
853-012350-002-230D LAM Research 853-012350-002-230D Lam 4420 Outer Gate Assembly 853-012350-002-230D Used Working LAM RESEARCH Request Quote
853-012350-002-D LAM Research 853-012350-002-D Lam 4420 Outer Gate Assembly 853-012350-002-D Used Working LAM RESEARCH Request Quote
853-012350-002-F-230D LAM Research 853-012350-002-F-230D Lam 4420 Outer Gate Assembly 853-012350-002-F-230D Used Working LAM RESEARCH Request Quote
853-012350-002-F-230S LAM Research 853-012350-002-F-230S LAM 4420 Etcher Outer Gate Assembly 853-012350-002-F-230S Working LAM RESEARCH Request Quote
853-012350-002-H-LL LAM Research 853-012350-002-H-LL Lam 4420 Outer Gate Assembly 853-012350-002-H-LL Used Working LAM RESEARCH Request Quote
853-012350-002-J-LLFD Lam Research 853-012350-002-J-LLFD Lam Research 853-012350-002-J-LLFD Outer Gate Assembly Lam 4420 Etcher working LAM RESEARCH Request Quote
853-012350-002-J-LLFDR LAM Research 853-012350-002-J-LLFDR Lam 4420 Outer Gate Assembly 853-012350-002-J-LLFDR Used Working LAM RESEARCH Request Quote
853-012350-002-LLFDR LAM Research 853-012350-002-LLFDR Lam 4420 Outer Gate Assembly 853-012350-002-LLFDR Used Working LAM RESEARCH Request Quote
853-012350R002 LAM Research 853-012350R002 LAM Research 4420 Etcher Outer Gate Assembly 853-012350R002 working LAM RESEARCH Request Quote
853-012500-001 LAM Research 853-012500-001 Lam 4420 Shuttle Assembly 853-012550-001 Used Working LAM RESEARCH Request Quote
853-012500-002-B LAM Research 853-012500-002-B Lam 4420 Edge Sensor Assembly 853-012500-002-B Used Working LAM RESEARCH Request Quote
853-012500-002-E-LEAN LAM Research 853-012500-002-E-LEAN LAM Research 4420 853-012500-002-E-LEAN Edge Sensor Assembly 853-012500-002 LAM RESEARCH Request Quote
853-012500R-002-E-ELM LAM Research 853-012500R-002-E-ELM LAM Research 4420 853-012500R-002-E-ELM Edge Sensor Assembly 853-012500-002 LAM RESEARCH Request Quote
853-012550-001-D LAM Research 853-012550-001-D Lam 4420 Shuttle Assembly 853-012550-001-D Used Working LAM RESEARCH Request Quote
853-012550-001-F-C222 LAM Research 853-012550-001-F-C222 LAM Research Wafer Shuttle Assembly 4420 853-012550-001-F-C222 working LAM RESEARCH Request Quote
853-012550-001-H LAM Research 853-012550-001-H Lam 4420 Shuttle Assembly 853-012550-001-H Used Working LAM RESEARCH Request Quote
853-012550-002 LAM Research 853-012550-002 LAM 4420 Etcher Edge Sensor Assembly 853-012550-002 LAM RESEARCH Request Quote
853-012726-001 LAM Research 853-012726-001 LAM 4420 Etcher 853-012726-001 Wafer Transport Assembly Rev.G 853-012550-001 LAM RESEARCH Request Quote
853-012726-001-G-C222 LAM Research 853-012726-001-G-C222 Lam 4420 Etcher Wafer Transport Assembly 853-012726-001-G-C222 working LAM RESEARCH Request Quote
853-012726-101 LAM Research 853-012726-101 LAM 4420 Etcher 853-012726-101-B Wafer Transport Assembly 853-012550-001 working LAM RESEARCH Request Quote
853-012726-101-C-C222 LAM Research 853-012726-101-C-C222 LAM 4420 853-012726-101-C-C222 Wafer Transport Assy. working LAM RESEARCH Request Quote
853-012726-501-1-LEAN LAM Research 853-012726-501-1-LEAN LAM Research 853-012726-501-1-LEAN LAM 4400 Series Transport Assembly Used LAM RESEARCH Request Quote
853-013540-002 LAM Research 853-013540-002 LAM Research 4420 Heated Chamber Manifold 853-013540-002 working LAM RESEARCH Request Quote
853-013541-002 Lam Research 853-013541-002 Heated Throttle Valve Assembly Rev.C working LAM RESEARCH Request Quote
853-013542-002-C-LEAN LAM Research 853-013542-002-C-LEAN Lam 4420 Angle Valve Assembly 853-013542-002-C-LEAN working LAM RESEARCH Request Quote
853-013575-002 LAM Research 853-013575-002 LAM 4420 Heated Interconnect Manifold Assembly 853-013575-002 Working LAM RESEARCH Request Quote
853-013610-001 LAM Research 853-013610-001 LAM 4420 Etcher Solenoid Tray Assembly 853-013610-001 LAM RESEARCH Request Quote
853-013610-001-D LAM Research 853-013610-001-D Lam Research 4420 Solenoid Tray Assembly 853-013610-001-D Used Working LAM RESEARCH Request Quote
853-013610-001-D-C222 LAM Research 853-013610-001-D-C222 Lam 4420 Solenoid Tray Assembly 853-013610-001-D-C222 Used Working LAM RESEARCH Request Quote
853-013610-001-E-4050 LAM Research 853-013610-001-E-4050 Lam 4420 Solenoid Tray Assembly Missing PCB 853-013610-001-E-4050 Used Working LAM RESEARCH Request Quote
853-013610-001-E-LEAN LAM Research 853-013610-001-E-LEAN Lam 4420 Solenoid Tray Assembly Missing PCB 853-013610-001-E-LEAN Used Working LAM RESEARCH Request Quote
853-013610-111-1-C222 LAM Research 853-013610-111-1-C222 Lam Research 4420 Solenoid Tray Assembly 853-013610-111-1-C222 Used Working LAM RESEARCH Request Quote
853-013610-111-2-C222 LAM Research 853-013610-111-2-C222 Lam 4420 Solenoid Tray Assy. 853-013610-111-2-C222 working LAM RESEARCH Request Quote
853-013610-501-A-LEAN LAM Research 853-013610-501-A-LEAN Lam 4420 Solenoid Tray Assembly Missing PCB 853-013610-501-A-LEAN Used Working LAM RESEARCH Request Quote
853-015130-103 LAM Research 853-015130-103 Lam 4420 RF Match Gear Drive Assembly 853-015130-103 Rev.C working LAM RESEARCH Request Quote
853-015130R-503-C-ELMPNE LAM Research 853-015130R-503-C-ELMPNE Lam 4420 Gear Driven RF Match 853-015130R-503 LAM RESEARCH Request Quote
853-01620-001 Rev. A LAM Research 853-01620-001 Rev. A Lam Research 4420 Tri-Convectron Assembly 853-01620-001 Rev. A Used Working LAM RESEARCH Request Quote
853-01620-001-A-C222 LAM Research 853-01620-001-A-C222 Lam Research Tri-Convectron Assembly 853-01620-001-A-C222 Used Working LAM RESEARCH Request Quote
853-017160-002-F-1273 LAM Research 853-017160-002-F-1273 LAM Research 853-017160-002-F-1273 Rear EMO Assembly LAM 4420 Used Working LAM RESEARCH Request Quote
853-017160-583-B-LEAN LAM Research 853-017160-583-B-LEAN Lam 4420 Rear EMO Assembly 853-017160-583-B-LEAN Used 810-017003-004 Working LAM RESEARCH Request Quote
853-017162-002 LAM Research 853-017162-002 LAM Research Rear EMO Assembly 853-017162-002 Rev. F Working LAM 4420 LAM RESEARCH Request Quote
853-017162-583-B-LEAN LAM Research 853-017162-583-B-LEAN LAM Research Rear EMO Assembly 853-017162-583-B-LEAN LAM 4420 working LAM RESEARCH Request Quote
853-017163-001 LAM Research 853-017163-001 LAM Research RF Switch Box Assembly 853-017163-001 Rev. G Working LAM 4420 LAM RESEARCH Request Quote
853-017163-001-D-3710 LAM Research 853-017163-001-D-3710 Lam Research 4420 RF Switch Box 853-017163-001-D-3710 Used Working LAM RESEARCH Request Quote
853-017163-001-G-1997 LAM Research 853-017163-001-G-1997 LAM 4420 Etcher RF Switch Box 853-017163-001-G-1997 LAM RESEARCH Request Quote
853-017163-001-G-262B LAM Research 853-017163-001-G-262B LAM Research 853-017163-001-G-262B RF Switch Box LAM 4420 Used Working LAM RESEARCH Request Quote
853-017163-001-G-MAIN Lam Research 853-017163-001-G-MAIN Lam Research 4420 853-017163-001-G-MAIN RF Switch Box working LAM RESEARCH Request Quote
853-017163-101 LAM Research 853-017163-101 LAM Research RF Switch Box Assembly 853-017163-101 Rev. 3 Working LAM 4420 LAM RESEARCH Request Quote
853-017410-003 Assy. cable.LWR match,Pk det. LAM RESEARCH Request Quote
853-017427-001-C-C136 LAM Research 853-017427-001-C-C136 Lam Research 4420 Control Module 853-017427-001-C-C136 working LAM RESEARCH Request Quote
853-017435-001-A-1996 LAM Research 853-017435-001-A-1996 Lam Research 4420 4 Pin Lifter Filter 853-017435-001-A-1996 Used Working LAM RESEARCH Request Quote
853-017620-001 LAM Research 853-017620-001 LAM Research 4420 Tri-Convectron Interface Assembly 853-017620-001 working LAM RESEARCH Request Quote
853-017620-001-A LAM Research 853-017620-001-A Lam Research 4420 853-017620-001-A Tri-Convectron Interface Assembly working LAM RESEARCH Request Quote
853-017620-001-A-C222 LAM Research 853-017620-001-A-C222 Lam Research 4420 853-017620-001-A-C222 Tri-Convectron Interface Assembly used LAM RESEARCH Request Quote
853-017825-050 LAM Research 853-017825-050 LAM Research Generator Cart Cable 853-017825-050 New LAM RESEARCH Request Quote
853-020936-001 LAM Research 853-020936-001 LAM Research 4420 Upper Seal Plate Assembly 853-020936-001 working LAM RESEARCH Request Quote
853-020936-002-C-CHFDER LAM Research 853-020936-002-C-CHFDER Lam 4420 Upper Seal Plate Assembly 853-020936-002-C-CHFDER working LAM RESEARCH Request Quote
853-024401-100 LAM Research 853-024401-100 LAM Research 4420 Etcher 853-024401-100-9 Orbital Gas Panel Assembly as-is LAM RESEARCH Request Quote
853-024403-006 LAM Research 853-024403-006 LAM Research 4420 853-024403-006 Orbital Gas Panel Assembly working LAM RESEARCH Request Quote
853-024403-100 LAM Research 853-024403-100 LAM Research 4420 Etcher 853-024403-100-10 Orbital Gas Panel Assembly as-is LAM RESEARCH Request Quote
853-024403-100-10 LAM Research 853-024403-100-10 Lam 4420 Etcher Orbital Gas Panel Assy 853-024403-100 LAM RESEARCH Request Quote
853-024403-100-8 Lam Research 853-024403-100-8 Lam Research 4420 Etcher 853-024403-100-8 Orbital Gas Panel Assembly untested LAM RESEARCH Request Quote
853-024403-500-E1 LAM Research 853-024403-500-E1 Lam Research 4420 853-024403-500-E1 Orbital Gas Panel Assembly untested as-is LAM RESEARCH Request Quote
853-024403-503-E1 LAM Research 853-024403-503-E1 LAM Research 4420 853-024403-503-E1 Orbital Gas Panel Assembly LAM RESEARCH Request Quote
853-024403-583 LAM Research 853-024403-583 LAM Research 4420 Etcher 853-024403-583-A Orbital Gas Panel Assembly as-is LAM RESEARCH Request Quote
853-024403-583-C LAM Research 853-024403-583-C Lam Research 4420 Etcher 853-024403-583-C Orbital Gas Panel Assembly untested LAM RESEARCH Request Quote
853-024403-583-C-254 LAM Research 853-024403-583-C-254 LAM Research 4420 Etcher 853-024403-583-C-254 Orbital Gas Panel Assembly as-is LAM RESEARCH Request Quote
853-025901-001-1-C136 LAM Research 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 Used Working LAM RESEARCH Request Quote
853-025944-001-1-C221 LAM Research 853-025944-001-1-C221 Lam Research 4420 RF Sense Box Autotune 853-025944-001-1-C221 Used Working LAM RESEARCH Request Quote
853-034701-001 LAM Research 853-034701-001 LAM Research Front EMO Cover Assembly 853-034701-001 Rev. B Working LAM 4420 LAM RESEARCH Request Quote
853-140013-001-1-230 LAM Research 853-140013-001-1-230 Lam 4420 Outer Gate Assembly 853-140013-001-1-230 Used Working LAM RESEARCH Request Quote
853-140013-001-1-230D LAM Research 853-140013-001-1-230D LAM 4420 Etcher Outer Gate Assembly 853-140013-001-1-230D Working LAM RESEARCH Request Quote
853-140013-001-1-230S LAM Research 853-140013-001-1-230S LAM 4420 Etcher Outer Gate Assembly 853-140013-001-1-230S Working LAM RESEARCH Request Quote
853-24403-100-6 Lam Research 853-24403-100-6 Lam Research 4420 Etcher 853-24403-100-6 Orbital Gas Panel Assembly untested LAM RESEARCH Request Quote
853-370871-002 Rev B Voltage ntrolled Interface PCB LAM RESEARCH Request Quote
853-491940-001 LAM Research 853-491940-001 LAM Upper Match RF Cable 853-491940-001 New LAM RESEARCH Request Quote
853-495477-001 Rev B Cable LAM RESEARCH Request Quote
855-001164-004 LAM Research 855-001164-004 Lam 490 590 ASSY PROG ROM SET 855-001164-004 new LAM RESEARCH Request Quote
860-010110-013 LAM Research 860-010110-013 Lam 4420 Reaction & Lower Chamber 852-011061-103 Lower Match Box 860-010110-013 LAM RESEARCH Request Quote
860-010168-001 LAM Research 860-010168-001 LAM Research 4420 Rear E.M.O. Enclosure 860-010168-001 Used Working LAM RESEARCH Request Quote
880-12537-101.A2 LAM Research 880-12537-101.A2 LAM 4420 Etcher CPU PCB 880-12537-101.A2 Working LAM RESEARCH Request Quote
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