T&C Power Conversion 120 Watts RF Power at 13.56 MHz for Industrial and Laboratory Applications FEATURING: • 13.56 MHz up to 120 Watts in peak power • Low harmonic RF Power Module level at 100W, bet- ter than –50 dBc RF Power Module 0113M is a robust source of RF power for laser any harmonic modulation, plasma generation, general laboratory and general • Measuring industrial applications. forward, reflected, Featuring leading edge solid state design for all generator stages and load power and a built-in signal source, it provides everything for a complete and simultaneously reliable, controlled RF power delivery system. It reflects the T&C ongoing commitment to provide RF power products of the highest • DB-25 Interface quality, incorporating the current requirements for complete remote Control & Monitor- control and data acquisition features. ing of all RF Power Module functions. GENERAL monitored for protection of output T&C generators are designed to be • AGC Power stage and is set for 50W limit. reliable, compact and light in Leveling: Output weight. The use of conservatively OUTPUT PROTECTION Power Control to rated components ensures high 0113M is protected by its internal reliability and eliminates the need better than ±1.5W monitoring system for 120 Watts of for periodic retuning. of set value total Forward Power and 50W of • Pulse operation in OPERATION Reflected Power. This will protect The 0113M produces 120W of RF MGC/Burst mode the RF power module output stage power at a frequency of 13.56 from extreme mismatch at the MHz, with low harmonic distortion. output. Power meters are calibrated into a 50 Ohm Load and they are accurate when unit operates into matched load. Outside of matched condition, the model 0113M’s 110 Halstead Street Rochester, New York 14610 power measurement system USA Tel: 585.482.5551 Fax: 585.482.8487 provides an accurate reading of www.tcpowerconversion.com sales@tcpowerconversion.com VSWR. High level VSWR is also www.tcpowerconversion.com 1 T&C POWER CONVERSION Safety Labels Labels are provided to alert operating and service personnel to conditions that may cause personal injury or damage to the equipment from misuse or abuse. Please read the labels and understand their meaning. Important Operating or Maintenance Caution Definition: Attention, consult accompanying document The exclamation point within a triangle is to alert the user, operator or service personnel to the presence of important operating and/or maintenance instructions in the User’s Manual. Shock Hazard Warning Definition: Caution, risk of electric shock The lighting bolt within a triangle is to alert the user, operator or service personnel to the presence of unpro- tected voltage points within the enclosure of sufficient magnitude to cause dangerous electrical shock. Only authorised service personnel with the schematic diagram and knowledge of the voltages within the equipment shall remove covers or panels bearing this symbol. CAUTION WARNING Do not operate this RF Power Source with the cover removed. Lethal voltages are present be- neath the cover. The cover protects against electrical shock due to AC line voltage, high RF potential in the hundreds of Volts at the output transformer, coupler and output connections. The cover is an integral part of the air ducting system that keeps components cool. Without the cover in place, insufficient air flows between and around will cause overheating of the internal components. Always connect the load to the RF output connector before connecting the RF input to the amplifier. This will ensure that high voltage at the center pin of the output N connector will not be exposed. Take care not to interchange the input and output cables. Chassis Terminal Be sure the chassis is grounded to a reliable earth ground using the grounding stud provided on the rear panel. www.tcpowerconversion.com 2 0113M RF Power Source Specifications Power Monitor Scale Class Of Operation Weight Class B 3.0 kg, 6.5 lbs. Selection User selectable levels down to 1 watt (in three (3) Scales) within tenths of Frequency Of Operation watt accuracy. 13.56 MHz Case Available scales: Aluminum Covers and 1V=100W Chassis. Frequency Stability 5V=full power (default) Chassis designed to meet EMI RFI 0.005% or better 10V=full power shielding requirements. RF Power Output Pulse Specifications Mounting 120 Watts into 50 Ohm nominal Pulse Width from 2 µs to continues, Half Rack, 2U high. Mounting Kit user defined. Internal RF Source included. Crystal oscillator at 13.56 MHz RF Power Margin (Open Loop Max Power/Rated Power)-1)*100 Environmental conditions Input and Output Impedance >50 % Temp.: 10° to 40° C ambient 50 Ohm Humidity: 80% Equipment intended for ISM applica- Rear Panel RF Connectors IN / OUT VSWR tions in laboratory and light industrial OUTPUT N Female 1.2:1 max - input environment. 3:1 max - output DC Power Connection Output VSWR Protection Terminal Block 50 Watts max reflected power limit. Automatic, limits typically within 0.5 DC Circuit Protection ms after reverse power reaches 50 Internally fused on the main DC Watts or power amplifier current Power Supply, 7A. preset limit. DC Input Current Harmonic Level @ 100W RF Out 120W: Better than -50 dBc for any harmonic. 48V DC - max. I = 6.0 A Spurious Output NOTE! Module requires external - 55 dBm equivalent noise level 48VDC power supply. generated by internal circuits Cooling Output Blanking/Pulsing Forced air, temperature controlled, For pulsed applications, T&C heatsink temperature monitored for amplifiers and generators offer blanking of equipment safety at 70C limit. the output signal for minimum noise RF spectrum. Less then 1µs Rise/Fall time Dimensions Case: H 89mm x W 200mm x Dynamic Power Range L 292mm 1 to 120W, settings within +/- 2W ( 3.50” x 7.88” x 11.50” ) Note: 0 to more than 120W W/ connectors: H 89mm x Output Control Interfaces W 200mm x L 316mm (Communications) ( 3.50” x 7.88” x 12.45” ) SubD 25 Analog and Digital I/O www.tcpowerconversion.com 3 Analog Communication Port DB-25 Connection: Pin # Name of Signal Signal Description TTL Compatible REV LIMIT - This output indicates that output 1 Hi = RF Out Limit, power level was automatically reduced under Lo = Normal operating condition at low VSWR. Signal Direction: OUT load mismatch conditions. Linear voltage output, 5 Vdc = 120W scale (default, analog) REVERSE POWER 2 Signal Direction: OUT NOTE: scale depends on pin4 and pin17 Linear voltage output, 5 Vdc = 120W scale (default, analog) FORWARD POWER 3 Signal Direction: OUT NOTE: scale depends on pin4 and pin17 5 Vdc = 120 W, Pin 4=Lo, Pin 17=Lo, (default setting, analog port) POWER MONITOR SCALE 4, 17 Signal Direction: IN NOTE: contact factory for other settings. Linear voltage input, 5 Vdc = 120W scale - (default, analog). RF PWR REF 5 (Per selection on Pin 4 & 17, 1Vdc = 100W or 10 Vdc = 120W) Signal Direction: IN Part of AGC in default setting. Part of BURST if Pin 16 is Hi . TTL Compatible; Hi = RF Output on, GENERATOR ENABLE / DISABLE 8 Lo = RF Output off, (RF ON/OFF) Signal Direction: IN NOTE! By default unit operates in AGC Mode. TTL Compatible; Hi = Fault/Amp disable, HEAT SENSE - This output indicates that the unit 9 Lo = amplifier enabled has become too hot. Signal Direction: OUT TTL Compatible POWER ON: DC power applied to control circuit; 11 Hi = Power ON, indirect meaning AC is ON. Lo = Power OFF Signal Direction: OUT 20 mV/C TEMPERATURE MONITORING 12 Signal Direction: OUT TTL Compatible BLANKING SIGNAL 14 Hi = interrupts RF at output connector, Lo = uninterrupted operation. Signal Direction: IN TTL compatible input: EXTERNAL BURST - Defines Pulse Time and 15 Hi - Burst RF Output Width input. Lo - Burst RF Off TTL compatible input: EXTERNAL BURST CONTROL SELECT 16 Hi - RF External Burst Ready Lo - No Signal or Burst Off NOTE! when selected Pin 5 - RF PWR REF switches from AGC mode to MGC and defines the amplitude of output Burst. TTL compatible input: POWER LOAD MODE ENABLE 20 Hi - Power Load Mode Enable Lo - Power Load Mode Off Signal Direction: IN NOTE: optional on special request. Return for pin 14, 15 and 16 ANALOG GROUND (BLANKING AND BURST 18, 19, 21 RETURN) TTL Compatible; SOURCE 22 Lo (or nothing connected) - internal signal source Hi = external signal source selected Signal Direction: IN Linear voltage output, 5 Vdc = 120W scale (default, analog) POWER LOAD METER 24 Signal Direction: OUT NOTE: optional on special request. 5 V dc (250 mA limited by electronic protection) INTERFACE POWER 25 Other levels of 10V and 12 V available! Please contact factory. Signal Direction: OUT www.tcpowerconversion.com 4