® Polycold PFC Fast Cycle Water Vapor Cryopump CRYOGENICS The Polycold Fast Cycle Water Vapor Cryopump (PFC) effectively Compliant with European captures water vapor, which comprises 65% to 95% of the Application Refrigerants residual gas in high-vacuum systems. Water vapor is typically the (EC 1005/2009), the Montreal Protocol, and the US EPA SNAP most reactive contaminant present. With the PFC 1102, you can expect to increase product throughput in your existing system Benefits 20% to 100% and improve quality of deposition. • -90˚ to -140˚C (183 to 133 K) • Heat Removal to 3600 Watts The PFC Advantage • High-vacuum pumpdown time cut by 25% to 75% • Cryocondenses Water • High-speed pumping of water vapor: up to 200,000 l/sec in the workspace Vapor in Vacuum Systems with Speeds to 200,000 l/sec • Increased product throughput of 20% to 100% -9 Vacuum Levels to 1.5 x 10 • Typical payback times of less than one year -9 torr (2 x 10 mbar) • Lower water vapor partial pressure during processing for higher film quality, • Provides very fast pumping better adhesion and more reproducible deposition speeds for water vapor, • Superior in cost/performance to liquid nitrogen cooled Meissners which is typically 65% to When added to your vacuum system, the PFC Cryopump can dramatically reduce pumpdown 95% of the gas load in high vacuum systems. times and increase product throughput. The PFC will pump water vapor within minutes from “start” and can defrost in less than four minutes, giving true fast-cycle capability. For your • Green refrigerant charge is globally compliant, non- system, this means more production cycles per shift. Pumpdown times are typically reduced by toxic, and non-flammable 25% to 75%, and increases in product throughput are 20% to 100%. • Based on Polycold’s proven, Using Polycold’s patented cryogenic refrigeration process, and patented refrigerant mixtures, innovative, dependable the PFC works on the principle of Meissner trapping. Water vapor is captured by condensation mixed-gas cryogenics on a cryogenically cooled surface, called a Meissner coil. The Meissner (cryocoil) is mounted • ISO 9001:2008 certified directly in the vacuum chamber so conductance is not limited by ports, manifolds, valves and manufacturer baffles. The cryocoil is easy to install and can be adapted to fit any system. It does not need a • CE Marked to the PED high-vacuum valve. PFC Cryopumps are the most cost-effective pumping upgrade you can add to any diffusion-pumped, turbo- pumped or helium-cryopumped system. A control module allows you to have either local or remote operation, enabling you to operate the PFC from your existing controller or processor. The PFC is available in a variety of capabilities and cryocoil configurations. Models are available that control two cryocoils or the combination of a cryocoil and a baffle. Please refer to Product Specifications and to our PFC Price List for price and option details. ® Polycold PFC 1102 WWW.BROOKS.COM CRYOGENICS Selection and Application How do I select the right size PFC unit to trap water vapor What’s the best temperature to trap water vapor in my vacuum chamber? effectively? Determining the appropriate PFC system depending upon To find the cryosurface temperature that is best for your the desired water vapor pumping speed and the ability of vacuum system, find the ultimate base pressure of your the chamber to accommodate the required amount of cold system listed below. Then follow across to the right column element (cryocoil) surface area. The larger the cryocoil, the which shows the required cryosurface temperature. This greater the pumping speed. Typically, we recommend an temperature provides 90% water vapor trapping efficiency. DESIRED AVERAGE DESIRED AVERAGE increase in chamber net speed of four times the existing WATER VAPOR CRYOSURFACE WATER VAPOR CRYOSURFACE PARTIAL TEMPERATURE PARTIAL TEMPERATURE (net in-chamber) water vapor pumping speed. This PRESSURE NEEDED PRESSURE NEEDED typically results in a pumpdown time reduction of from torr mbar °C torr mbar °C 0 0 -5 -5 25% to 75%. Once the approximate unit size and 5 x 10 6.7 x 10 –25.4 5 x 10 6.7 x 10 –104.9 0 0 -5 -5 cryocoil surface area have been established, the required 2 x 10 2.7 x 10 –34.4 2 x 10 2.7 x 10 –109.1 0 0 -5 -5 temperature and cooling capacity of the system are 1 x 10 1.3 x 10 –40.8 1 x 10 1.3 x 10 –112.2 -1 -1 -6 -6 5 x 10 6.7 x 10 –46.8 5 x 10 6.7 x 10 –115.1 reviewed against the presence of any additional heat load -1 -1 -6 -6 2 x 10 2.7 x 10 –54.3 2 x 10 2.7 x 10 –118.1 (long refrigerant lines, process heat, etc.). -1 -1 -6 -6 1 x 10 1.3 x 10 –59.7 1 x 10 1.3 x 10 –121.5 -2 -2 -7 -7 5 x 10 6.7 x 10 –64.8 5 x 10 6.7 x 10 –124.1 -2 -2 -7 -7 2 x 10 2.7 x 10 –71.2 2 x 10 2.7 x 10 –127.5 -2 -2 -7 -7 1 x 10 1.3 x 10 –75.8 1 x 10 1.3 x 10 –129.9 -3 -3 -8 -8 5 x 10 6.7 x 10 –80.1 5 x 10 6.7 x 10 –132.2 -3 -3 -8 -8 2 x 10 2.7 x 10 –85.6 2 x 10 2.7 x 10 –135.2 -3 -3 -8 -8 1 x 10 1.3 x 10 –89.6 1 x 10 1.3 x 10 –137.3 -4 -4 -9 -9 5 x 10 6.7 x 10 –93.4 5 x 10 6.7 x 10 –139.5 -4 -4 -9 -9 2 x 10 2.7 x 10 –98.2 2 x 10 2.7 x 10 –142.1 -4 -4 -9 -9 1 x 10 1.3 x 10 –101.6 1 x 10 1.3 x 10 –144.1 Key System Components 1 CRYOCOIL The cryocoil will be designed to fit the specific vacuum chamber, based on infor- mation you supply, or you may choose to design and build your own cryocoil. Typical cryocoils have helical, spiral, serpentine or other simple shapes. We do not recommend cryopanels; they slow the cool/defrost times due to increased mass and cryopump ineffectively on the rear side if positioned near the chamber wall. A stainless steel cryocoil, a complex cryocoil design or an adapter flange, may require additional costs. 2 FEEDTHROUGH To Max. wall thickness refrigerant 47mm, 1.88" Air side Vacuum side line Return The standard cryogenic feedthrough provides thermal isolation between the feed/return tubes and the O-ring seal. The dual pass feedthrough requires a two-inch diameter hole in the vacuum chamber. Couplings on the feed-through Feed mate with the refrigerant line. Optional feedthroughs Hole diameter fit one-inch diameter holes, but two are required (one for each tube). Custom 76mm 3.00" 52mm, 2.03" feedthroughs are available. 152mm, 6.00" To cryosurface 283mm, 11.13" 3 REFRIGERANT LINE A standard refrigerant line set consists of a copper feed and return line, each Direction of refrigerant flow with stainless steel couplings on both ends for connection to the PFC unit and to To feedthrough the feedthrough. Longer lengths of refrigerant line (more than the standard 8 feet Return To PFC unit (2.44m) can be ordered from the factory. However, if the line length is longer than 15 feet (4.57m), it may be necessary to select the next larger PFC unit because Feed Thermocouple wires (2) of the additional heat load imposed by the longer line. Contact the factory for the 2,440mm, 96.0" cost of longer lines. Vacuum insulated lines may also be used. 76mm, 3" ® Polycold PFC Model PFC Configurations (not to scale, standard refrigerant line is 8 feet) BASE UNIT SYSTEM Customer’s Vacuum Chamber Couplings Standard 8 foot with stubs refrigerated line Cryocoil PFC UNIT Cryogenic Vacuum Feedthrough PFC - Standard PFC Features: • Factory-charged with HCFC and CFC FREE refrigerant • Temperature indicator with differential analog output • Electronic controller to terminate defrost • Control module for local manual control • Remote connector to permit operation with your controller or your manual controls (Remote operation requires relays, switches, and wiring by end-users.) SYSTEM BASE UNIT OR OR OR OR Baffle(s) Optional BAFFLE(S) OPTIONAL PFC/PFC - Multi-Purpose PFC and PFC Features: BAFFLE(S) OPTIONAL • Includes all standard PFC features listed above • The two cryosurfaces (consisting of: two cryocoils, coil and baffles or two baffles) can be cooled or defrosted separately. Total cooling capacity may be divided º 1/2-1/2 or 2/3 - 1/3 between the two circuits. Note: (1) when one cryocoil is temperature-cycled, the baffle or other cyrocoil temperature may vary up to 20 C. (2) baffles not included in system price. PFC/PFC Application Note: The intended application for a PFC/PFC configuration is for the operation of two cryocoils in different locations within a single in-line system. This configuration is also successful in the operation of cryocoils in two different load-locked systems. For batch systems we recommend a dedicated Polycold PFC per vacuum system. Helpful Information for Sizing Systems Radiation Heat Load on Cryocoil 2 2 - (At 25ºC Ambient Conditions) -376.6 watts/m (35 watts/ft ) - Refrigerant Line Heat Load -26.3 watts/m (8 watts/ft) - Vacuum Jacketed Line Heat Load -1.0 watts/m (0.3 watts/ft) 2 2 - Water Vapor Pumping Speed (Theoretical) - 149,000 l/s/m (13,842 l/s/ft ) - Liquid Nitrogen Cooling Approximately (45 watts/liter/hour) Simple Work Sheet Ultimate Base Pressure_______Required Temperature:_______C Heat Load Cryocoil______________________ Heat Load Refrigerant Line______________________ Feedthrough 20 watts/feedthrough x # of feedthroughs___________________ Additional Heat Load (Process Heat, etc.)______________________ Total Heat Load______________________ CRYOGENICS Diagnostics & Controls for PFC, PFC/PFC 552, 672, 1102 The operator interface (Control Panel) pictured below is used on the PFC model PFC-552 and larger PFC systems. It illustrates most of the options available. Temperature Included as standard in this module is a (H) Refrigerant Temperature High digital temperature meter (C) with a ten Discharge Temperature Light indicates that position thermocouple select switch (D). the temperature of the refrigerant was too A The switch allows monitoring of various hot temperatures within the system and at at the compressor discharge. remote locations. Standard temperature B C (I) Cooling Water Supply High Liquid monitoring points include: Temperature Light Indicates loss of water, 1. Compressor Discharge too little water, reversed flow or scale built- D 2. Refrigerant Liquid Line up inside the condenser. 3. Cryocoil Feet (circuit 1)* (J) Operating Indicator Light Indicates the 4. Cryocoil Return (circuit 1)* compressor contactor has activated and no 5. Cryocoil Feed (circuit 2)* faults are included. 6. Cryocoil Return (circuit 2)* E 7. Refrigerant Feed (circuit 1) F Compressor Power On/Off 8. Refrigerant Return (circuit 1) H (K) On/Off Rocker Switch AC Power 9. Coldest Liquid Indicator Light (Located on High Voltage I G 10. Refrigerant Return (circuit 2)* Box not shown). Indicates the Disconnect *Customer Assigned Switch is activated and AC power is on. Illustrated is an optional second J K PFC Circuit 1 temperature meter, set point relay PFC Circuit 2 includes the same features and indicating lamp (A). The customer as Circuit 1 and is available on PFC/PFC specifies the locations to be monitored Models. with the set point relay and the meter. Not illustrated is an optional temperature (L) Remote/Local Control Switch set point relay with indicator lamp (B). The Remote feature allows the customer The customer specifies the location to L to control the PFC unit from a remote be monitored. location via the customer’s own equipment A three position rocker controller/computer. The local mode System Control Module switch handles all pri- M enables the Control Panel switches to be Fault Lights/Controls: Flow Diagram mary functions: Defrost, Standby, and Cool used to operate the unit. • Compressor Protection • Dual Pressure Switch (M) Defrost/Standby/Cool Switch When the previous Remote/Local Control Switch (E) Low Pressure Light Indicates that N (L) is in the “Local” position, the three (3) the compressor suction pressure position rocker switch initiates all primary dropped too low (refer to operating functions: Defrost – Standby – Cool. manual). (N) Status Lights Indicates operation (F) High Pressure Light Indicates that Model PFC Control Panel mode: defrost complete, defrost active, the compressor discharge pressure was standby, cool. too high (refer to Operating Manual). (G) Reset Button Resets any fault indicated on system control once the problem has been corrected. ® Polycold PFC Options for Models PFC, PFC/PFC 552, 672, 1102 Temperature Setpoint Relay Isolated Electrical Interface for User’s Indicates that the selected temperature is colder than the Controller predetermined setpoint. Inside the module, the setpoint If you want to control the PFC unit remotely with other can be adjusted between -80C and -160C. When the than switch closures, your control voltage and the PFC unit temperature from the input thermocouple drops below the must be electrically isolated. To meet this requirement, the defined setpoint, a thermocouple limit switch lights a lamp optional isolated relay interface is available in 6, 12, or 24 on the panel and closes a relay contact which completes volts, 50/60 HZ AC or DC. (Specify desired voltage at time a circuit to the remote connector. Customer decides at of order.) time of purchase which location is to be dedicated to the • 24V Part No. 600248-01 (for Model PFC) setpoint. • 24V Part No. 600248-02 (for Model PFC/PFC) • Part No. 600212-02 Remote Temperature Indicator Meter Second Temperature Meter with Setpoint This is a separate digital meter that is not installed in the Relay PFC unit. It allows the user to read the analog output Provides continuous readout of temperature and setpoint signal from the installed temperature meter at a remote status for a second thermocouple position in a location control panel up to 50 feet away. of customer’s choice. • Part No. 353010-01 (For voltage 115/1/60) • Part No. 600212-03 • Part No. 353010-02 (For voltage 230/1/60) • Part No. 353010-03 (For voltage 24 volts) Temperature Setpoint Relay and Second Temperature Meter with Setpoint Relay Remote Meter with 50 foot electrical cable If you would like to order both of the previous two • Part No. 840109-01 (For voltage 115/1/50-60) items, please specify: • Part No. 840109-02 (For voltage 230/1/50-60) • Part No. 600212-04 • Part No. 840109-03 (For voltage 24/1/50/60) Rollcoating of Paper and Plastics Semiconductor/optical deposition decorative/functional coating Magnetic disc /flat panel display deposition CRYOGENICS Comparison of Cryopumping Speed and Pressure - 60hz PFC-1102HC, PFC-672HC, PFC-552HC 220,000 200,000 PFC-1102HC 180,000 160,000 140,000 120,000 100,000 80,000 60,000 PFC-672HC 40,000 PFC-552HC 20,000 0 -13 -12 -11 -10 -9 -8 -7 -6 -5 -4 -3 -2 -1 10 10 10 10 10 10 10 10 10 10 10 10 10 Water Vapor Partial Pressure, Torr NOTE: For some operating conditions the cryocoils may be enlarged to provide greater pumping speeds Comparison of Average Temperature (A) and Cryosurface Temperature vs. Heat Load (B) - 60hz PFC 1102HC, PFC 672HC, PFC 552HC –90 –100 –110 –120 –130 –140 –150 –160 0 500 1500 2000 2500 3000 1000 3500 4000 Heat Load, Watts NOTE: 1. Temperatures shown are the average of the inlet and outlet using recommended cryocoil size. The temperature differences between inlet and outlet are typically 20˚C at Maximum load. 2. The end point of each curve is the maximum load for that model. 3. Performance at 50 Hz is typically 3 to 5°C warmer than the 60 Hz performance shown PFC-1102HC PFC-672HC PFC-552HC Cryosurface Temperature, C Pumping Speed, Liters per second ® Polycold PFC PFC Specifications 552HC 672HC 1102HC a Typical Performance Maximum Load (Watts at warmest temperature) 1000 1500 3600 b Theoretical max pumping speed l/sec 74,500 104,300 298,000 b Conservative pumping speed (in chamber) l/sec 50,000 70,000 200,000 c -9 -9 -8 Ultimate Operating Pressure, torr 2 x 10 6 x 10 3.0 x 10 -9 -9 -8 Ultimate Operating Pressure, mbar 3 x 10 8 x 10 4 x 10 d Maximum pump start pressure, atm 1.0 1.0 1.0 h Time to defrost, minutes 4.0 4.0 7.0 Cryocoils and Refrigerant Lines 2 2 Total Cryocoil Surface area m (ft. ) 0.5 (5.4) 0.7 (7.5) 2.0 (21.6) Single Circuit (PFC) Tube O.D., mm (in.) 12 (1/2) 16 (5/8) 16 (5/8) Tube Length m (ft.) 13.3 (41.1) 14 (46) 40 (132) Dual Circuit (PFC/PFC) Tube O.D., mm (in.) 12 (1/2) 12 (1/2) 16(5/8) Tube Length per coil, m (ft.) 6.6 (20.6) 9.28 (29) 20(66) Standard refrigerant line lengths m (ft.) 2.44 (8) 2.44 (8) 2.44 (8) Utilities Cooling water, flow rate l/min. (gal./min.) at 13C (55F) 4.9 (1.3) 6.8 (1.8) 13.6 (3.6) at 26C (79F) 12.3 (3.2) 17.3 (4.6) 33.8 (8.9) at 29C (85F) 19.7 (5.2) 27.6 (7.3) 54.1 (14.3) Power Input, at maximum load, kW 6.0 8.3 19.2 e Nominal Power Requirements 200/3/50-60 200/3/50-60 200/3/50-60 230/3/60 230/3/60 230/3/60 380/3/50 380/3/50 380/3/50 400/3/50 400/3/50 400/3/50 460/3/60 460/3/60 460/3/60 480/3/60 480/3/60 480/3/60 f Max Operating Sound Level, dB(A) 71 72 81 3 3 g Minimum Room Volume m (ft. ) 13 (460) 16 (570) 27 (955) Footnotes: (a) Standard conditions for performance testing. (1) Cryocoil environment at 20˚C (2) Recommend cryocoils and line lengths (3) Cooling water temperature between 25˚C and 28˚C. (4) Operation at 60 Hz. (b) Larger cryocoils may give greater pumping speeds, and can be used in some applications. Contact your sales representative or the factory for application details. (c) Standard cryocoil at twenty five percent (25%) of maximum pumping speed. (d) Recommended cryopump start pressure is near normal “crossover.” Mechanical roughing pumps and blowers are generally more effective for moisture removal above 1torr. (e) For nominal power requirements not on the table, please contact the factory. Please refer to the manual for operational voltage ranges. For 480 volt operation the maximum voltage is 506. (f) Units were tested in a manufacturing environment while under maximum load in the COOL mode. (g) To comply with the Safety Code for Mechanical Refrigeration, ANSI/ASHRAE-15-1994, the following units should be located in a room no smaller than listed. (h) 7.0 minute maximum defrost is for a 2 m2 coil. Most applications use 2 smaller coils and achieve shorter defrost times. A 1 m coil with standard refrigerant lines will defrost in less than 4 minutes. Notes: All units have cryocoils that may be decoupled from the refrigerant lines and remote control capability with built-in remote connector. Maximum angle of inclination for shipping or handling all units is forty-five degrees (45˚) ® CRYOGENICS Polycold PFC PFC-1100, PFC-660, PFC-550 PFC Dimensions and Weight (not to scale) B H I PFC-400LT PFC-330 B B B PFC-100 J C PFC 1102, PFC 672, PFC 552 C C C F A A A A G D E Model A B C D E F G H I J Weight Standard mm/Inches kg./lb. Refrigerant Line PFC 1102 1054 711 1689 914 140 102 203 457 114 1562 544 8 ft. 41.5 28 66.5 36 5.5 4 8 18 4.5 61.5 1200 2.44m PFC 672 953 660 1842 812 140 254 203 432 114 1727 476 8 ft. 37.5 26 72.5 32 5.5 10 8 17 4.5 68 1050 2.44m PFC 552 953 660 1842 812 140 254 203 432 114 1727 408 8 ft. 37.5 26 72.5 32 5.5 10 8 17 4.5 68 900 2.44m “Combination” or “Multi-Purpose” PFC Models have the same dimensions as the “Standard PFC” Models in the equivalent size unit. (For example, a PFC/PFC 1102 has the same dimensions as a PFC 1102). For PFC 552, PFC 672, and PFC 1102 (and corresponding “Combination” or “Multi-Purpose” PFC Models) allow 45 cm (18 inches) clearance for utili- ties, refrigerant line connection and controls on the right hand panel as seen viewing the front of the unit. For more information, please contact your local Brooks Automation sales representative or visit www.brooks.com. Brooks Automation, Inc. • 15 Elizabeth Drive • Chelmsford, MA 01824 U.S.A. • Tel: (978) 262-2400 • Fax: (978) 262-2500 • www.brooks.com ® © 2012 Brooks Automation, Inc. , Polycold , CTI-Cryogenics, Cryo-Torr, On-Board and GUTS are registered trademarks of Brooks Automation, Inc. 140957-05 05/12