Datasheet F-111B Mass Flow Meters for Gases > Introduction Bronkhorst High-Tech model F-111B Mass Flow Meters (MFMs) are suited for precise control of virtually all conventional process gases. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve. The mass flow, expressed in normal millilitres or litres per minute or per hour, is provided as analog signal or digitally via RS232 or fieldbus. The flow range and wetted materials are determined depending of the type of gas and the process conditions of the application. Although all specifications in this datasheet are believed to be accurate, the right is reserved to make changes without notice or obligation. EL-FLOW Mass Flow Meter model F-111B > Technical specifications Measurement / control system Electrical properties Accuracy (incl. linearity) : ± 0,5% Rd plus ± 0,1% FS Power supply : +15…24 Vdc ±10% (Based on actual calibration) Power consumption : max. 320 mA; Turndown : 1 : 50 (in digital mode up to 1:187,5) add 50 mA for Profibus, if applicable Multiple fluid capability : • storage of max. 8 calibration curves Analog output : 0…5 (10) Vdc, min. load impedance > 2 kΩ; • optional Multi Gas / Multi Range 0 (4)…20 mA (sourcing), max. load impedance < 375 Ω functionality up to 10 bar abs Analog setpoint : 0…5 (10) Vdc, min. load impedance > 100 kΩ; Repeatability : < ± 0,2% Rd (for MFM + control valve) 0 (4)…20 mA, load impedance ~250 Ω ® TM Response time (t ) : 1…2 sec 63% Digital communication : standard RS232 ; options: Profibus-DP , DeviceNet , ® Temperature range : -10…+70°C EtherCAT , Modbus-RTU/ASCII, FLOW-BUS Temperature sensitivity : zero: < ± 0,05% FS/°C; > Ranges (based on Air) (nominal range) span: < ± 0,05% Rd/°C -9 Leak integrity (outboard) : < 2 x 10 mbar l/s He Model minimum nominal maximum Attitude sensitivity : max. error at 90° off horizontal 0,2% at 1 bar, typical N2 F-111B-020 0,16…8 ml /min 0,16…20 ml /min 0,16…30 ml /min n n n Warm-up time : 30 min. for optimum accuracy F-111B-050 0,4…20 ml /min 0,4…50 ml /min 0,4…75 ml /min n n n 2 min. for accuracy ± 2% FS F-111B-100 0,8…40 ml /min 0,8…100 ml /min 0,8…150 ml /min n n n F-111B-200 1,6…80 mln/min 1,6…200 mln/min 1,6…300 mln/min Mechanical parts F-111B-500 4…200 ml /min 4…500 ml /min 4…750 ml /min n n n Material (wetted parts) : stainless steel 316L or comparable F-111B-1K0 8…400 ml /min 8…1000 ml /min 8…1500 ml /min Pressure rating : 100 bar abs n n n Process connections : compression type or face seal male F-111B-2K0 16…800 ml /min 16…2000 ml /min 16…3000 ml /min n n n Seals : standard : Viton; options: EPDM, Kalrez F-111B-5K0 0,04…2 l /min 0,04…5 l /min 0,04…7,5 l /min n n n Ingress protection (housing) : IP40 F-111B-10K 0,08…4 l /min 0,08…10 l /min 0,08…15 l /min n n n F-111B-20K 0,16…8 l /min 0,16…20 l /min 0,16…25 l /min n n n Intermediate ranges are available > Model number identification F N N NNA NNN A A A NN A Base Nominal range Internal seals 1 Meter Factory selected V Viton (factory standard) E EPDM K Kalrez (FFKM) Communication (I/O) A RS232 + analog (n/c control) B RS232 + analog (n/o control) Pressure rating Connections (in/out) D RS232 + DeviceNet (n/c) 1 100 bar 1 1/8“ OD compression type E RS232 + DeviceNet (n/o) M RS232 + Modbus-RTU (n/c) 2 ¼“ OD compression type N RS232 + Modbus-RTU (n/o) 3 6 mm OD compression type P RS232 + Profibus-DP (n/c) 8 ¼” Face seal male Ranges 9 other Q RS232 + Profibus-DP (n/o) 1B 0…8 / 0…25000 mln/min R RS232 + FLOW-BUS (n/c) 0 none S RS232 + FLOW-BUS (n/o) Analog output Supply voltage A 0…5 Vdc D + 15…24 Vdc B 0…10 Vdc F 0…20 mA sourcing G 4…20 mA sourcing > Thermal mass flow measuring principle > State of the art digital design ® The heart of the thermal mass flow meter/controller is the sensor, that Todays EL-FLOW series are equipped with a digital pc-board, consists of a stainless steel capillary tube with resistance thermometer offering high accuracy, excellent temperature stability and fast elements. A part of the gas flows through this bypass sensor, and is response. The basic digital pc-board contains all of the general warmed up heating elements. Consequently the measured functions needed for measurement and control. In addition to the temperatures T and T drift apart. The temperature difference is standard RS232 output the instruments also offer analog I/O. 1 2 TM directly proportional to mass flow through the sensor. In the main Furthermore, an integrated interface board provides DeviceNet , ® channel Bronkhorst High-Tech applies a patented laminar flow Profibus-DP , Modbus-RTU or FLOW-BUS protocols. element consisting of a stack of stainless steel discs with precision- etched flow channels. Thanks to the perfect flow-split the sensor output is proportional to the total mass flow rate. ∆T = k.Cp.Øm ∆T = T2-T1 in Kelvin Cp = specific heat Øm = mass flow Functional scheme of the thermal mass flow sensor Functional scheme of the digital PC-board > Hook-up diagram for analog or RS232 communication > Hook-up diagrams for fieldbus communication For the available fielbus options we refer to the various hook-up diagrams as indicated below. If you are viewing this datasheet in digital format, you may use the hyperlink to each of the drawings. Otherwise please visit the download section on www.bronkhorst.com or contact our local representatives. Doc. 9.16.062 Doc. 9.16.060 Doc. 9.16.061 Doc. 9.16.098 Doc. 9.16.064 Doc. 9.16.063 > Dimensions (mm) and weight (kg) Dimension table adapters (RS-type) Weight: 0,5 kg > Options and accessories - Multi-Gas / Multi-Range option, with free configuration software. - Free software support for operation, monitoring, optimizing or to interface between digital instruments and windows software. - IN-LINE filters for protection against particulates - BRIGHT compact local Readout/Control module - E-5700 / E-7000 Power Supply - Interconnecting cables for power and analog/digital communication - PiPS Plug-in Power Supply > Alternatives + - IQ FLOW, world’s smallest Mass Flow Meter - LOW-∆P-FLOW series MFM for low pressure drop applications or corrosive gas service - Metal Sealed MFM for Semiconductor or other high purity applications Nijverheidsstraat 1a, NL-7261 AK Ruurlo The Netherlands T +31 (0)573 45 88 00 F +31 (0)573 45 88 08 I www.bronkhorst.com E info@bronkhorst.com E.DS.F-111B.0313.F