4027A 4027A Precision Power Sensors for Precision Process Applications • Achieves tighter, more consistent RF power measurements for improved yield. • ±1% accuracy at specified calibration frequencies and power levels. • Direct, plug-in operation with the industry standard Bird Model 4421 RF Power Meter. • Multiple sensors provide for measurement of 0.3W to 10kW over a 250kHz to 60MHz frequency range. ® Let Bird Be an Extension of Your RF Design Team! ® The Bird Engineering Design Team provides over 250 years of collective RF Engineering experience. Bird's new 4027A Series Power Sensors represent a family of sen- sors for use in semiconductor processing and other precision process Our R & D / Design Engineers focus on leading edge tech- applications. Intended for use with the industry standard Bird Precision nology, product integrity and Laboratory Power Meter Model 4421, these products provide a threefold quality control. improvement in long-term unit-to-unit accuracy. We have the expertise to pro- vide a standard or custom product to suit an environment or Application: a specific design application. Periodically, power delivery systems used in semiconductor wafer processing must be calibrated against an accurate RF power standard, incorporating a highly repeatable laboratory standard ® Bird Electronic Corporation power meter. This calibration is used to correct for drift in the system power sensor. Typically, designs and manufactures these calibration standard power meters are accurate to within ±3% of reading, with measure- a diverse range of products, from ment-to-measurement repeatability on the order of ±1%. Although these parameters are quite RF power meters and antenna good, the semiconductor industry is requiring better performance from calibration systems, par- analyzers to high power RF load ticularly in the area of long-term unit-to-unit uniformity and measurement repeatability. These resistors. This broad product more stringent system calibrations result in the best possible fab yields. offering requires an equally Improvements in calibration system accuracy and long-term repeatability have a direct effect on diverse design skills base. process yields. The effects of RF calibration setpoint accuracy on process yields is related to the consistency with which the same amount of RF energy is applied to an etch process over many cycles. Generally, there is not a great deal of drift in the calibration sensor setpoint over time, but it is easy to see how the RF power delivery to the etch chamber could be affected if two different calibration sensors, differing by as much as 6% were used to calibrate the RF generator. This new family of power sensors allows for the tightening of the RF power calibration window from 6% to 2%. At the same time, these new techniques greatly reduce the possibility of time- related setpoint drift problems. Ordering Information: Order these new power sensors according to the frequency range and operating power level of your fabrication system. See the specification table for frequency ranges and power levels. ® Bird Electronic Corporation 1-866-695-4569 www.bird-electronic.com *Bird Service Center Now calibrates NON-Bird as well as Bird electrical test equipment. SPECIFICATIONS 4027A Power Measurement: Accuracy: ±1% of reading at calibration frequencies and power levels; ±2 % over entire frequency and power range. Calibration Power Level: 1000W units: 700 watts. 10kW units: 1700 watts. Uniformity: 2 % maximum unit to unit, at calibration frequency and power levels. Speed: 2 readings per second. Maximum Power: 10 kW units - 12 kW max 1 kW units - 1.2 kW max Connectors: *Customer Specified Power Requirements: External DC: 12 Vdc, supplied from Multifunction Power Meter. Physical Specifications: Dimensions: 5-7/32" L x 2-1/2" W x 3-1/4" H. Weight: 1 lbs. 11 oz. (0.76 kg). Environmental Specifications: Operating Temperature: 15° to 35°C (59° to 95°F). Storage Temperature: -40° to 80°C (-40° to 176°F). Humidity: 95% ± 5% maximum (non-condensing). Altitude: Up to 10,000 feet (3,048 m). General EMC: Designed to carry CE mark (with immunity exception noted below). Emissions: EN-55011, 1991, Class B. Immunity: EN-50082-1, 1995. Safety: EN-61010, 1993 in accordance with Council Directives 73/23/EEC and 93/68/EEC. Calibration Cycle: 1 year. Performance before and performance after data to be supplied for units. Model Power Range Frequency VSWR Range Directivity Insertion Loss 4027A12M 300 mW to 1 kW 10-15 MHz 1.0 to 2.0 28 dB <0.05 dB 4027A250K 3 W to 10 kW 250-400 kHz 1.0 to 2.0 28 dB <0.05 dB 4027A400K 3 W to 10 kW 400-550 kHz 1.0 to 2.0 28 dB <0.05 dB 4027A800K 3 W to 10 kW 800-950 kHz 1.0 to 2.0 28 dB <0.05 dB 4027A2M 3 W to 10 kW 1.5-2.5 MHz 1.0 to 2.0 28 dB <0.05 dB 4027A4M 3 W to 10 kW 3-5 MHz 1.0 to 2.0 28 dB <0.05 dB 4027A10M 3 W to 10 kW 10-15 MHz 1.0 to 2.0 28 dB <0.05 dB 4027A25M 3 W to 10 kW 25-30 MHz 1.0 to 2.0 28 dB <0.05 dB 4027A35M 3W to 10 kW 35-45 MHz 1.0 to 2.0 28 dB <0.05 dB 4027A60M 3W to 6kW 45-65 MHz 1.0 to 2.0 28 dB <0.05 dB Also available - Standard 4020 series 4021 (300mW-1kW, 1.8-32 MHz), 4022 (300mW-1kW, 25-1000 MHz), 4024 (3W-10kW, 1.5-32 MHz), and 4025 (3W- 10kW, 100-2500 MHz). ±3% of reading accuracy and 28 dB minimium directivity. If you need assistance in selecting products from our standard 4020-series sensor line, please contact a sales engineer at Bird Electronic Corporation. *For connector options, please refer to our catalog or contact sales at 866.695.4569 / sales@bird-eletronic.com 30303 Aurora Road, Cleveland, OH 44139-2794 Tel: 866.695.4569 Fax: 866.546.4306 Email: sales@bird-electronic.com © 2003 Bird Electronic Corporation Website: http://www.bird-electronic.com 871-SEM-190-1002