Elite.Parts

Description

ULVAC PMB-006CS Mechanical Booster Pump

Part Number

PMB-006CS

Price

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Manufacturer

ULVAC

Lead Time

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Category

PRODUCTS - P

Specifications

3 Phase Induction Motor

Type: YTFO

App. Weight

179 Lbs.

Cycles

50 60 HZ

Dimensions

29.25" x 11.5" x 15"

Displacement

500 600 M3/Nr

Form

K 3.7kw, 2 pole

Motor Power

3.7 kw

Oil Cap

1.5

Revolution

3000 3600 rpm

Features

Oil-free-Since no lubricating oil is used in the casing, stable performance is realized even
Operation at high inlet pressure-Since a motor larger than the standard motor can be installed, the pumps are sufficiently applicable to systems having high gas loads, such as CO2 laser processes.
Vertical or horizontal exhaust-The vertical or horizontal direction can be selected for the exhaust port on the pump. This feature provides greater system design flexibility and makes very compact des
when evacuating water vapor or solvent vapors.

Datasheet

PMB-006CS-1826381075.pdf

41 KiB

Download

Extracted Text

Components Division ULVAC, Inc. Vacuum Pump (Mechanical Booster Pump) Mechanical Booster Pump PRC-A Series, PMB-B, C (M) Series Booster pumps can be used with roughing pumps, such as oil PMB-C series are roots-type vacuum pumps designed pri- rotary pumps, dry vacuum pumps, and water sealed pumps, marily for use in processes where a high level of cleanliness in order to improve the pumping speed in the 10 k-0.1 Pa is required. range, where pumping speeds of roughing pumps often dete- In addition to general use, these pumps are well-suited to riorate. PMB-B series pumps are well-suited to the large vol- semiconductor manufacturing processes, CO2 laser ume evacuation requirements of vacuum heating furnace, processes, and other processes. vacuum melting furnace and other equipment. PRC-A & Features • Oil-free Since no lubricating oil is used in the casing, stable performance is realized even when evacuating water vapor or solvent vapors. • Operation at high inlet pressure Since a motor larger than the standard motor can be installed, the pumps are suf- ficiently applicable to systems having high gas loads, such as CO2 laser processes. • Vertical or horizontal exhaust (PMB-024C (M), 040B, 060B) The vertical or horizontal direction can be selected for the exhaust port on the pump. This feature provides greater system design flexibility and makes very compact designs possible. • Shorter evacuation time PMB-CM, PRC-A Since these PRC-A (atmospheric pressure operation type) & PMB-CM series can be started at the same time as the roughing pumps, shorter evacuation times are possible when compared to the standard type mechanical booster pump. Specifications Item Model PMB-001C, CM PMB-003C, CM PRC-003A PRC-006A PRC-012C PMB-024C, CM PMB-040B PMB-060B 1 Actual pumping speed* 50 Hz 95 (1580) 280 (4670) 280 (4670) 500 (8330) 1000 (16700) 2000 (33300) 3800 (63300) 6200 (103300) 3 m /h (L/min) 60 Hz 115 (1920) 330 (5500) 330 (5500) 600 (10000) 1200 (20000) 2400 (40000) 3 3 3 2 3 50 Hz 9.3 x 10 1.2 x 10 1.3 x 10 8.0 x 10 1.3 x 10 (within 5 min. at startup) 2 Maximum suction pressure* 2 8.0 x 10 3 3 3 2 Pa 60 Hz 7.3 x 10 9.3 x 10 1.1 x 10 6.7 x 10 (during continuous operation) 3 3 3 3 Maximum allowable differential 50 Hz 8.0 x 10 4.0 x 10 7.3 x 10 5.6 x 10 —— 2 3 3 3 3 pressure * Pa 60 Hz 6.7 x 10 3.3 x 10 6.0 x 10 4.7 x 10 3 -1 -1 Ultimate pressure* Pa 4.0 x 10 6.7 x 10 4 5 Allowable drive pressure* Pa ~1.0 x 10 (PRC-A [atmospheric pressure operation models], PMB-CM) 5 Motor* kW (number of poles) 0.4 (2) 0.75 (2) 2.2 (2) 3.7 (2) 7.5 (2) 15 (4) 18.5 (4) 6 ® Oil* ULVOIL R-4 7 Oil capacity* L 0.35 0.7 1.5 1.9 4.5 (2.8) 6.5 6.5 Both air and Cooling method Air cooling Water cooling water cooling Primary side pressure MPa — 0.3 0.1-0.2 Inlet/outlet differential pressure MPa — 0.05 0.01 0.05 Cooling water volume L/min — 2 3 24 Cooling water temperature °C — 5-30 Corresponds Corresponds Corresponds Corresponds Corresponds Corresponds Suction port diameter JIS B2290 to VG50 to VG80 to VG100 to VG200 to VG250 to VG300 Corresponds Corresponds Corresponds Corresponds Corresponds Exhaust port diameter JIS B2290 to VF50 to VF80 to VF200 to VF150 to VF200 External dimensions L x W x H mm 217 x 529 x 180 290 x 656 x 260 296 x 565 x 260 356 x 619 x 320 406 x 756 x 340 540 x 1237 x 470 764 x 1230 x 707 764 x 1470 x 707 950, 1150, 8 Weight* kg 22 (23) 46 (48) 51 (54) 86 (90) 118 (123) 260 (272) without motor without motor Standard backing pump EC403 EC603 EC803 VS1501 PKS-070 PKS-070 x 2 — 1.5 kW (2) motor atomospheric pressure operation models 1.1 kW (2) motor 11 kW (2) motor Bypass valve, piping Options Separate exhaust port for lubrication chamber — Note) SI units are used in this catalog. The following conversion can be used for non-SI units. *4 With the PMB-024CM, do not allow the repeated pumping operation time from atmospheric –1 –3 Ultimate pressure: 4.0 x 10 Pa = 3.0 x 10 Torr pressure to vacuum ( 655Pa) to exceed 5 minutes. Also, allow an interval of at least 5 min- 2 Pressure: 0.05/0.1/0.2/0.3 MPa = 0.5/0.1/2/3kgf/cm utes before starting the next pumping operation. *1 Measurement value at 13 Pa *5 AC200V 50/60 Hz, AC220V 60 Hz, 3 phase *2 When the optional large capacity motor is attached, a greater inlet pressure and larger pressure *6 Other oil types are available, upon request differential is possible. (Only PMB-003C, PMB-024C) *7 Oil capacities in ( ) are for models with the horizontal exhaust direction specification. *3 Measured with a Pirani gauge (standard backing pump and oil were used.) The value would be *8 Weights in ( ) are for CM and PRC-A atmospheric pressure operation models. –2 4.0 x 10 Pa when measured with a McLeod vacuum gauge. VACUUM COMPONENTS 52 Cooling water Components Division ULVAC, Inc. Pumping Speed Curve 3 L/min m/h PMB-001C 10000 600 Pumping Speed(JIS B8316/1985) PMB-003C Type :PMB-001C, 003C PRC-006A 60Hz PRC-003A, 006A PRC-003A Forepump :PMB-001C EC403 PMB-003C EC603 500 PRC-003A EC603 PRC-006A PRC-006A EC803 8000 Power :AC200V 50/60Hz 3 phase PRC-006A 50Hz ® Oil :ULVOIL R-4 Gauge :Pirani :Capasitance Manometer 400 PMB-003C 60Hz 6000 PRC-003A 60Hz 300 PMB-003C 50Hz 4000 PRC-003A 50Hz 200 PMB-001C 60Hz 2000 100 PMB-001C 50Hz EC803 EC603 EC403 0 0 –1 2 3 4 5 1 Pa 10 10 10 10 10 10 Pressure 3 L/min m/h PRC-012A 50000 3000 PMB-024C Pumping Speed(JIS B8316/1985) Type :PRC-012A, PMB-024C Forepump :PRC-012A VS1501 2500 PMB-024C PKS-070 40000 Power :AC200V 50/60Hz 3 phase ® Oil :ULVOIL R-4 Gauge :Pirani :Capasitance Manometer 2000 30000 PMB-024C 60Hz PMB-024C 50Hz 1500 20000 1000 PRC-012A 60Hz PRC-012A 50Hz 10000 500 PKS-070 VS1501 0 0 –1 2 3 4 5 Pa 10 1 10 10 10 10 10 Pressure 3 L/min m/h PMB-040B Pumping Speed(JIS B8316/1985) PMB-060B 100000 6000 Type :PMB-040B,060B PMB-060B Forepump :PMB-040B PKS-070 PMB-060B PKS-070X2 Power :AC200V 50/60Hz 3 phase ® 5000 Oil :ULVOIL R-4 :Pirani 80000 Gauge :Capasitance Manometer 4000 60000 PMB-040B 3000 40000 2000 20000 1000 PKS-070X2 PKS-070 0 0 –1 2 3 4 5 10 1 10 10 10 10 10 Pa Pressure VACUUM COMPONENTS 53 Pumping speed Pumping speed Pumping speed

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