CLS-1000 Corrosive Liquid Sampler BENEFITS Defect Reduction • Quick sample cycle allows for faster detection of anomalies • Large sample volume allows for tighter process control and less data variability • 0.1 µm sensitivity for ultra-pure processing Increase Productivity • 50 ml/minute flow rate and 100% view volume mean quicker process qualification • Longer wet bench maintenance intervals based on data collected in real-time Cost Effective • User-selectable volume per test conserves expensive chemicals • Compression sampling allows instrument to measure most chemicals, including effervescent chemicals, up to 9 0 °C • Easily portable for use throughout factory Built-In Safety • Internal leak detection and containment • Corrosive-resistant polypropylene exterior The CLS-1000 corrosive liquid sampler from Particle Measuring Systems • Purge gas forces dangerous vapors out of is a compression sampler combined with a Liquistat® volumetric particle enclosure to prevent internal corrosion counter for measuring liquid chemicals up to 90 °C. Built-in safety • Visible status indicator features including leak detection and purge air make it ideal for use with dangerous solvents and acids. Designed for versatility and reliability, the system can be integrated into a wet bench or located on a cart for APPLICATIONS increased mobility when sampling from process to process. • Wet process monitoring • Bath qualification The sampler eliminates erratic data problems that are due to bubbles • Chemical QA measurements in effervescent or hot corrosive chemicals. Using reliable compression • General product monitoring techniques, the sampler forces bubbles contained in the sample back into solution for accurate particle analysis. The CLS-1000 corrosive liquid sampler is fully-compliant with the SEMI C1 standard for particle measurement of process chemicals. Without measurement there is no control. CLS-1000 Corrosive Liquid Sampler specifications Size range 0.10 – 0.50 µm Channels 0.10 – 0.14 user-selectable, 0.15, 0.20, 0.30, ≥ 0.50 Flow rate (ml/min) 50 ml/minute ± 10% Sample volume 25 ml Overflow volume 15 or 55 ml, user-selectable Maximum concentration* 5000 counts/ml Sample temperature 10 – 90 ºC System zero count < 1 count/ml Exterior surface Polypropylene with laser-etched and chemical-resistant epoxy graphics Wetted surface materials Kel-F®, PFA, sapphire, and Kalrez® 4079 Dimensions (h, w, d) 18 x 13 x 10 in (45 x 33 x 24 cm) Weight 35 lb (16 kg) Power 85 – 264 VAC (50-60 Hz) Communications Ethernet, 4-20 mA (three outputs: two particle channels, one instrument status), RS-232 (setup and diagnostics only, no data) Status indicators LEDs indicating operating pressures and operational status. Front panel graphic flow rate indicator. Calibration Materials used are traceable to USA National Institute of Standards and Technology (NIST) and/or Japanese Institute of Standards (JIS) Environment 15 – 35 ºC ambient Operating and purge gas Nitrogen or Clean Dry Air (CDA) 80 – 150 psi Sample compression pressure 0 – 60 psi @ 90 ºC Software Facility Net or SamplerSight, available separately Sampling Controlled via external software, sampling can be started by an external trigger signal *Greater than 90% accuracy (less than 10% coincidence loss) at maximum recommended concentration. Liquistat® is a registered trademark of Particle Measuring Systems, Inc. All other trademarks are the property of their respective owners. Particle Measuring Systems, Inc. reserves the right to change specifications without notice. AUTHORIZED REPRESENTATIVE Particle Measuring Systems China Particle Measuring Systems Japan Particle Measuring Systems Puerto Rico Tel: (86) 21-6113-3688 Tel: 813-5298-8175 Tel: 972-306-1040 Email: PMSChina@pmeasuring.com Email: PMSJapan@pmeasuring.com Email: PMSPuertoRico@pmeasuring.com Particle Measuring Systems Europe Particle Measuring Systems Mexico Particle Measuring Systems Singapore Tel: 44-1684-581000 Tel: 52-55-2271-5106 Tel: 65-6496-0330 Particle Measuring Systems Headquarters Email: PMSEurope@pmeasuring.com Email: PMSMexico@pmeasuring.com Email: PMSSingapore@pmeasuring.com 5475 Airport Blvd., Boulder, CO 80301, USA (303) 443-7100 1-800-238-1801 FAX: (303) 449-6870 Particle Measuring Systems Italia Particle Measuring Systems Nordic Instrument Service & Support: 1-800-557-6363 Tel: 39 06 90530130 Tel: +45 70702855 Customer Response Center: 1-877-475-3317 Email: PMSSRL@pmeasuring.com Email: PMSNordic@pmeasuring.com 122010 © 2010 Particle Measuring Systems, Inc. All rights reserved.