Specifications 6200 M ANUAL PROBING STATIONS Introduction Model 6200 The Model 6200 probe station is one of Micromanipulator’s Specifications most popular probing station models. It is designed to provide an instrument that can find application in both high precision System Components • Test station with fast analytical probing and general probing tasks. stage pullout feature. Allows fast transition The Model 6200 features a highly Loading and precise sample across wafer or easy stable base, platen and stage positioning may be accomplished as loading of sample while configuration. Stage controls are follows: maintaining precise provided in a coarse (40 micron per positioning in probing degree) and fine (1.7 microns per 1. Lift the probes and microscope area. degree) resolution range. The Model from the probing area with the 6200 also features a quick-pullout fast platen lift and coupled stage feature which allows rapid microscope lift mechanism. Platen repositioning of the wafer chuck or 2. Release the stage clutch and pull • Large stainless steel (magnetic) fast load/unload capability. With the stage to the station front. Load platen surface. proper accessories the Model 6200 the wafer and secure it with the • Accepts up to 10 magnetic or may be used for submicron level stage vacuum hold-down. vacuum based manipulators. probing. 3. Engage the stage clutch and • Provides ten BNC style or position the sample under the Features and Benefits optional triaxial probe signal microscope with the coarse stage strain reliefs. • Coaxial, coarse/fine stage controls controls. with fast stage pullout 4. Lower the platen fast lift arm, • Fast platen lift and lock (3 Platen Control Features then raise the probes slightly positions) with coupled using the fine platen lift so the • Range of fine lift travel is 1.187" microscope lift with adjustable probes and the sample are both (30mm) with 1.187" (30mm) of delay within the microscope depth of microscope lift delay. • Highly stable, vibration isolated field. • Fine lift resolution is 0.3 mm. microscope post 5. Position the probing sites under • Fast lift via fast lift lever • 1" x 1" X, Y microscope the probes using the fine X, Y positioned at the left side of the translation stage positioning and theta adjust probe station with 3 locking up controls. • Separate microscope lift and lock positions. mechanism 6. Lower the probes to overdrive • Platen fine lift allows submicron position with the platen fine lift • Platen fine lift (jackscrew drive) adjustment of probe or probe card and begin testing. 0.3 mm per degree vertical position. • Rigid platen with webbed The Model 6200 also allows for the construction and linear lift X-Y Stage Movement need to do high precision probing on accepts magnetic or vacuum a single die or packaged device. The • Convenient fine and coarse stage based manipulators. stage may be quickly changed for a movement in X and Y axis, with socket card holder without affecting fast pullout stage feature for Probing of internal circuit paths may stage planarity. The 6200’s massive, changing devices. be achieved with the Model 6200 in machined base provides a high an efficient manner. The dual degree of vibration isolation. Its resolution stage translation controls stable platen supports high allow first rapid movement from die resolution manipulators and optics to die on a wafer then fine 1555 Forrest Way Tel: 775-882-2400 are available with resolutions up to Carson City, NV 89706 Tel: 800-654-5659 positioning of the test area 0.4 microns and 4000X total info@micromanipulator.com Fax: 775-882-7694 underneath the probe tips. www.micromanipulator.com Made in the USA magnification. A1008391 rev 3 © 10/01 Specifications subject to change without notice. Microscope and Support Options for Model 6200 Model 6200 Specifications Post • Rigid microscope • CAD interface software (the Stage support post allows for Probe Pilot). • X and Y axis range gross microscope 6" x 6" (150mm x 150mm) • Cutting, malleable, shielded, positioning range in • Resolution specialty probes. excess of 4" and 40 mm/degree coarse resolution • High frequency, Microwave, supports optional 1.7 mm/degree fine resolution Active probes. upgrades to high resolution manual, • Thermal and thermal (hot)/cold Microscope motorized or program- chucks • 1" x 1" x 2" X, Y and Z axis range mable X, Y, Z drives. • Standard Precision (programmable) • Hybrid probing adapters. ± 2.5 mm Repeatability & Accuracy • Fast microscope lift with • Integral or disposable probe tips. • Advanced Precision lock allows microscope • Fixed probe card adapter. (programmable) ± 1.5 mm to be cleared from probe area without disturbing probes. • Light tight enclosure. Repeatability & Accuracy Standard configuration is a • Vibration isolation table. • Resolution dovetail slide, optional linear • Video and still photography 0.1 mm resolution, motorized or bearing is available. accessory systems. programmable 12.5 mm resolution, standard • Motorized and Programmable Vacuum Stage manual manipulators. 1.7 mm resolution, high resolution • 6-inch wafer chucks are available • Probe card holders. manual either gold plated or lapped • Socket Stage Adapter for probing stainless steel. packaged devices. o Platen • 360 chuck Theta rotation with • Laser Cutter. • 1" (25.4mm) Z axis range coarse or fine control. • 1" (25.4mm) Microscope lift delay • Motorized or Programmable • Flatness equals ± 12 microns. • 0.3 mm/degree fine lift resolution microscope XYZ drive with 10 • Electrical isolation exceeds 10 TM pcProbe navigation system. Ohms at 500v DC (standard Chuck • Microscope Selection chuck). • ± 12 mm Surface flatness (choose one): • 360 degrees Theta range • Chuck surface is electrically StereoZoom with up to 1000X connected to a BNC connector at (50X objective, 10X eyepieces, Facility Requirements left rear of probe station. 2X zoom) magnification, • Power 100-240v AC • Single point grounding standard. 1.0/0.5 ampere USMCO compound microscope • Optional Low Noise (triaxial) 60/50 Hz woth on-transformer control fiber chuck available with internal optic illuminator or optional • Vacuum 20 inch Hg wiring to rear of station. Isolation remote control. Includes 10X 12 exceed 10 at 500v DC. eyepieces, 2X, 10X and 20X Test Station Dimensions objectives, • Footprint (Width x Depth) Mitutoyo FS-70 with up to 2000X 22.75" x 23.35" (57.7x59.3cm) (100X objective, 10X eyepieces, • Width, Depth, Height 2X zoom) magnification, 28.5" x 26.75" x 21.5" Thayes-Optem's A-ZOOM (120X (72.3x67.9x54.6cm) to 4000X). • Weight: 246 lb. (542.3 kg) Construction • Material: Machined aluminum plate and magnetic stainless • Finish: Grained black anodized and grained natural finish A1008391 Page 2 The Micromanipulator Co., Inc. Specifications Specifications