TEGAL - Elite.Parts

PRODUCTS - 1 PRODUCTS - 4 PRODUCTS - 8 PRODUCTS - 9 PRODUCTS - T

Part Number Description Manufacturer

1511 Plasma Etcher, Parts Only TEGAL

400 strip/asher/descum TEGAL

411 Plasma Barrel Stripper TEGAL

800 series Poly Etch TEGAL

901e Nitride Etcher TEGAL

903e etcher TEGAL

915/965 Photo resist Stripper TEGAL

965 Barrel Asher TEGAL

99-096-09 Rev. G Tegal 99-096-09 Rev. G Tegal DIP Board 99-096-09 Rev. G Used Working TEGAL

99-186-001 Tegal 99-186-001 Tegal 99-186-001 Att-1 Interface Board Rev.2A working TEGAL

99-187-002 Tegal 99-187-002 Tegal 99-187-002 Interface Board Rev.B working TEGAL

99-196-002 ATT-2 Tegal 99-196-002 ATT-2 Tegal 99-196-002 ATT-2 Interface Board Rev.P working TEGAL

99-214-003 Tegal 99-214-003 Tegal 99-214-003 Interface Board Rev.H working TEGAL

99-247-003/J Tegal 99-247-003/J Tegal 99-247-003/J Interface Board working TEGAL

99-287-003/B Tegal 99-287-003/B Tegal 99-287-003/B Shuttle Interface Board working TEGAL

T1612 Metal Etcher TEGAL