Manufacturers
LEYBOLD CM31
Description
Leybold CM31 CONTROLLER 3GAUGES AND CABLES VACUUM
Part Number
CM31
Price
Request Quote
Manufacturer
LEYBOLD
Lead Time
Request Quote
Category
PRODUCTS - C
Features
- 100/120/200/230 Volts
- 35 VA
- 50/60Hz
Datasheet
Extracted Text
Vacuum Pumps Instrumentation Fittings and Valves LEYBOLD VACUUM
GA 09.504 / 5.02
COMBIVAC CM 31
Cat. No.
157 89, 896 89, 897 89
Operating Instructions
LEYBOLD-Service
If an appliance is returned to LEYBOLD, indicate
whether the appliance is free of substances damaging to
health or whether it is contaminated. If it is contaminated
also indicate the nature of hazard. LEYBOLD must
return any appliance without a declaration of contamina-
tion to the sender’s address.
General Note
The right of alterations in the design and the technical
data is reserved. The illustrations are not binding.
Contents
Page
Page
2.3.5 Keys TM 1, TM 2 and PM . . . . . . . . . . . . . . 11
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.3.6 Key HV . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.3.7 Key Decrement . . . . . . . . . . . . . . . . . . . . . 12
1.1.1 Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.3.8 Key Increment . . . . . . . . . . . . . . . . . . . . . . 12
1.2 Technical data . . . . . . . . . . . . . . . . . . . . . . . 4
2.3.9 Key PARA . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.2.1 General data . . . . . . . . . . . . . . . . . . . . . . . . 4
2.3.9.1 Checking and setting up of the
1.2.2 TM measurement channels . . . . . . . . . . . . . 4
equipment parameters . . . . . . . . . . . . . . . . 12
1.2.3 PM measurement channel . . . . . . . . . . . . . . 5
2.3.9.2 Locking of parameter settings . . . . . . . . . . 15
1.2.4 Relay outputs . . . . . . . . . . . . . . . . . . . . . . . . 5
2.4 Supply and socket connections
1.2.5 Chart recorder outputs . . . . . . . . . . . . . . . . . 5
on the rear . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.2.6 AC power requirements . . . . . . . . . . . . . . . 5
2.4.1 AC power supply . . . . . . . . . . . . . . . . . . . . 16
1.2.7 High voltage control input
2.4.2 Connection of the THERMOVAC gauge . . . 16
(only for PENNINGVAC) . . . . . . . . . . . . . . . . 5
2.4.3 Connection of the PENNINGVAC gauge . . . 16
1.2.8 Mechanical data . . . . . . . . . . . . . . . . . . . . . 6
2.4.4 Screw terminal outputs for the
1.2.9 Ambient conditions . . . . . . . . . . . . . . . . . . . 6
THERMOVAC channels . . . . . . . . . . . . . . . 16
1.2.10 RS 232 C interface
2.4.5 Screw terminal outputs for the
1.3 Technical description . . . . . . . . . . . . . . . . . . 6
PENNINGVAC channel . . . . . . . . . . . . . . . 17
1.3.1 COMBIVAC CM 31 . . . . . . . . . . . . . . . . . . . 6
2.4.6 RS 232 C interface . . . . . . . . . . . . . . . . . . 17
1.3.2 THERMOVAC method of measurement
2.5 Installing the instrument . . . . . . . . . . . . . . . 18
(Pirani) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.5.1 Installation . . . . . . . . . . . . . . . . . . . . . . . . . 18
1.3.3 PENNINGVAC method of measurement
2.5.2 Rack installation . . . . . . . . . . . . . . . . . . . . . 18
(cold cathode) . . . . . . . . . . . . . . . . . . . . . . . 6
2.5.3 Panel installation . . . . . . . . . . . . . . . . . . . . 18
1.3.4 RS 232 C interface . . . . . . . . . . . . . . . . . . . 7
2.5.4 Using the CM 31 as a table-top instrument . 18
1.4 Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.6 Checking the equipment functions . . . . . . . 18
1.4.1 Supplied equipment . . . . . . . . . . . . . . . . . . . 7
2.6.1 The THERMOVAC channels . . . . . . . . . . . 18
1.4.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . 7
2.6.2 The PENNINGVAC channel . . . . . . . . . . . . 19
2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.7 Alignment of the THERMOVAC
2.1 Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
gauge heads . . . . . . . . . . . . . . . . . . . . . . . 19
2.2 Electrical connection . . . . . . . . . . . . . . . . . . 8
2.8 Switching off . . . . . . . . . . . . . . . . . . . . . . . 19
2.2.1 Changing the line voltage setting and
2.9 Status messages . . . . . . . . . . . . . . . . . . . . 20
exchanging the fuses . . . . . . . . . . . . . . . . . . 9
2.10 Chart recorder output tables . . . . . . . . . . . . 21
2.3 Controls and their functions . . . . . . . . . . . . . 9
2.10.1 Chart recorder output tables for
2.3.1 Bar graph display . . . . . . . . . . . . . . . . . . . . . 9
TM measurement channels . . . . . . . . . . . . 21
2.3.2 Digital display . . . . . . . . . . . . . . . . . . . . . . 10
2.10.2 Chart recorder output tables for
2.3.3 Measurement units . . . . . . . . . . . . . . . . . . 10
PM measurement channel . . . . . . . . . . . . . 23
2.3.4 Status display area . . . . . . . . . . . . . . . . . . 10
2
Page Page
3 RS 232 C interface . . . . . . . . . . . . . . . . . . 25 3.6 Output of error messages . . . . . . . . . . . . . 29
3.1 Description . . . . . . . . . . . . . . . . . . . . . . . . 25 3.6.1 Interface errors (ERI) . . . . . . . . . . . . . . . . . 29
3.2 Interface parameters . . . . . . . . . . . . . . . . . 25 3.7 Program examples for setting
3.2.1 Baud rate . . . . . . . . . . . . . . . . . . . . . . . . . . 25 the parameters . . . . . . . . . . . . . . . . . . . . . 30
3.2.2 Data format . . . . . . . . . . . . . . . . . . . . . . . . 25 3.8 Examples for the cable link between
®
3.2.3 End and acknowledgement character the interface and an IBM -PC . . . . . . . . . . 34
for remote operation . . . . . . . . . . . . . . . . . . 25
4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . 35
3.2.4 Output rate and end character for
4.1 Service at LEYBOLD’s . . . . . . . . . . . . . . . . 35
printer output . . . . . . . . . . . . . . . . . . . . . . . 25
5 Brief operating instructions . . . . . . . . . . 36
3.3 Initial operation . . . . . . . . . . . . . . . . . . . . . 25
3.3.1 Remote control operation . . . . . . . . . . . . . . 25
3.3.1.1 Cable link . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.3.1.2 Baud rate and data format . . . . . . . . . . . . . 26
3.3.1.3 End character . . . . . . . . . . . . . . . . . . . . . . 26
3.3.1.4 Acknowledgement character . . . . . . . . . . . 26
3.3.1.5 Reset character . . . . . . . . . . . . . . . . . . . . . 27
3.3.2 Printer operation . . . . . . . . . . . . . . . . . . . . 27
3.3.2.1 Output of measurement data
to a printer . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.3.2.2 RS 232 C baud rate and data format
for printer output . . . . . . . . . . . . . . . . . . . . 27
3.3.2.3 Output rate for printer output . . . . . . . . . . . 27
3.3.2.4 End character . . . . . . . . . . . . . . . . . . . . . . 27
3.4 Data output and data formats . . . . . . . . . . . 27
3.4.1 Measurement data output . . . . . . . . . . . . . 27
34.1.1 Remote control operation . . . . . . . . . . . . . . 27
3.4.1.2 Printer output . . . . . . . . . . . . . . . . . . . . . . . 27
3.4.2 Parameter output and response time . . . . . 28
3.5 Interface commands and data input
for A-series instruments with
RS 232 C interface . . . . . . . . . . . . . . . . . . 28
3.5.1 Formation of measurement data
and readout commands . . . . . . . . . . . . . . . 28
3.5.2 Trigger adjustment commands . . . . . . . . . . 29
3.5.3 Operating parameters . . . . . . . . . . . . . . . . 29
3
1 Description
One PENNINGVAC sensor (PR 32, PR 25, PR 35 or PR
1.1 General
36) and max. two THERMOVAC sensors (TR 201, TR
205, TR 206 or also TR 211 and TR 216) may be con-
The COMBIVAC CM 31 is supplied ready for
nected.
use. However, we strongly recommend rea-
ding these Operating Instructions so that
The built-in RS 232 C interface permits computer con-
optimum operating conditions can be set up
trolled operation as well as the exchange of measure-
right from the start.
ment data between the COMBIVAC CM 31 and a com-
puter.
These Operating Instructions contain important informa-
Please refer to the technical data of this instrument to
tion on the functions, installation, start-up, operation and
troubleshooting of the CM 31. determine whether or not this instrument suits your appli-
cation.
Important remarks concerning operational safety and
protection are emphazised as follows.
Warning Indicates procedures that must be strict-
ly observed to prevent hazards to peo-
1.2 Technical data
ple.
1.2.1 General data
Caution Indicates procedures that must strictly
-9 +3
Measurement range 1·10 mbar to 1·10 mbar
be observed to prevent damage to, or
-9
1·10 Torr to 760 Torr
destruction of, the CM 31 and to attain
THERMOVAC channels 2
specified performance levels.
PENNINGVAC channel 1
Note
Indicates special technical requirements that the user
Measurement units mbar, Torr, Pa, Micron
must comply with.
(selectable)
Types of gas Air / N , Ar (selectable)
The references to diagrams, e.g. (2/5), consist of the Fig. 2
No. and the Item No. in that order.
Display
digital 7 segment LCD
Unpack the CM 31 immediately after delivery, even if it is
analogue LCD bar graph
to be installed at a later date.
Resolution see tables 3 and 4 or tables 7 and 8 in
Section 2.10.1 or 2.10.2.
Examine the shipping container for any external dama-
ge. Completely remove the packaging materials.
Note
1.2.2 TM measurement channels
Retain the packaging materials in the event of com-
-3
Measurement range 1·10 mbar to 1000 mbar
plaints about damage.
-3
1·10 Torr to 760 Torr
Check that the CM 31 is complete (see Section 1.4).
Measurement uncertainty in the range
-3 -2
10 to 10 mbar / Torr: 20 % of the meas. value
Carefully examine the CM 31 visually.
-2 +2
10 to 10 mbar / Torr: 15 % of the meas. value
If any damage is discovered, report it immediately to the
Sensors TR 201; DN 10 KF
forwarding agent and insurer. If the damaged part has to
TR 205; DN 16 CF and TR 206; DN 10 KF
be replaced, please contact Leybold.
TR 211; DN 16 KF and TR 216; DN 16 KF
Length of gauge head cable up to 100 m
1.1.1 Purpose
Cable length alignment
The COMBIVAC CM 31 is a universal vacuum gauge automatically for TR 211 and TR 216
which combines two principles of measurement - Pirani
For TR 201, TR 205 and TR 206
(Thermovac) and cold cathode (Penningvac) - for the
Enter cable length in the
measurement and control of vacuum pressures within
parameter mode (see Parameter-Page 9)
-9
the entire range between 1·10 mbar/Torr and atmos-
pheric pressure.
4
Trigger relays reaction time 30 ms approx. Note
for a pressure change exceeding The relay outputs also have been designed to handle
1 measurement decade signals for programmable controls.
Trigger relays thresholds
2 per measurement channel; changeover contact
1.2.5 Chart recorder outputs
Modes level / interval
Each measurement channel has its own chart recorder
output.
Ready indicator electrically
1 per measurement channel
Voltage range 0 to 10 V (nominal)
floating n.o. contact
(Limits - 0.6 V to + 10.6 V)
1 contact closed in ready mode
Load resistance R ‡ 2.5 kΩ
ext
Error display FAIL optically, 1 per meas. channel
Output voltage in the
event of a fault 10.2 V to 10.6 V
Characteristic linear / logatithmic
1.2.3 PM measurement channel
PENNING
Measurement range
log. 1.43 V / decade
-9 -2
-9
1·10 mbar/Torr to 1·10 mbar/Torr
(0 V ; 1·10 mbar)
-7
linear: 0 - 10 V ; 0 - 1·10 mbar
Measurement uncertainty in the range
-6
-8 -4
0 - 10 V ; 0 - 1·10 mbar
1·10 mbar/Torr to 1·10 mbar/Torr
-5
± 30 % of the meas. value
0 - 10 V ; 0 - 1·10 mbar
:
Sensors PR 25; DN 25 KF
:
PR 35; DN 40 KF
-2
0 - 10 V ; 0 - 1·10 mbar
PR 36; DN 40 CF
THERMOVAC
PR 31 and 32 (limited measurement range)
-3
log. 1.67 V / decade; (0 V ; 1·10 mbar)
Length of gauge head cable up to 100 m for the -4
0-10 V ; 5·10 - 1000 mbar (1,587 V / decade)
-8 -2
pressure range 1·10 to 1·10 mbar / Torr -2
linear: 0 - 10 V ; 0 - 1·10 mbar
-1
0 - 10 V ; 0 - 1·10 mbar
Trigger relays reaction time 40 ms approx.
0
0 - 10 V ; 0 - 1·10 mbar
for a pressure change exceeding
:
1 measurement decade
:
Triggers thresholds 2; changeover contact
0 - 10 V ; 0 - 1000 mbar
Modes single / interval
Reaction time 100 ms approx.
Ready indicator electrically floating n.o. contact
Resolution 2.5 mV (12 bit)
1 contact closed in ready mode
Deviation of the displayed value ± 2 %
Error display FAIL optically
1.2.6 AC power requirements
1.2.4 Relay outputs
Line voltage (selectable) 100 V, 120 V
Two variable thresholds per channel with one relay
200 V, 230 V
changeover contact each and one ready indicating cir-
+10 % / -15 %
cuit with n.o. contact.
Line frequency 50 to 60 Hz
Max. switching voltage 250 V AC / 60 V DC
Power consumption 35 VA
Max. switching capacity 5 A (AC, resistive load)
0.7 A (DC)
1.2.7 High voltage control input
Contact life 60,000 cycles
(only for PENNINGVAC)
Setting range of the variable thresholds
-8 -2
Input voltage 0 to 24 V DC
PM channel 1·10 to 1·10 mbar
-3
TM channel 5·10 to 500 mbar
Max. input voltage range - 33 V to + 33 V
-3
3.7·10 to 370 Torr
5
PC compatible logic level (LOW) < 7 V; 0 A
1.3 Technical description
PC compatible logic level (HIGH)
> 13 V; 7 mA (at 24 V)
1.3.1 COMBIVAC CM 31
Contact via relay approx. 24 V, supplied by the This combination instrument is equipped with three mea-
instrument across a protection resistor
surement channels, two THERMOVAC channels and
one PENNINGVAC. Thus it is possible to measure and
control the vacuum in over 12 decades ranging between
-9
1·10 mbar and atmospheric pressure. Six switching
1.2.8 Mechanical data
thresholds, three logarithmic chart recorder outputs and
Dimensions (WxHxD) in mm 106.5 x 128.5 x 285.5
the self-monitoring facility permit integration of the COM-
BIVAC CM 31 into complex vacuum control arrange-
Installation depth 375 mm
ments. The two THERMOVAC channels are immediately
Weight 2.3 kg
active as soon as the line voltage is applied. The PEN-
NINGVAC channel may be switched on and off through
the second THERMOVAC channel (TM 2), externally or
1.2.9 Ambient conditions
manually via HV-key; see also Section 2.3.6.
All operating modes of the triggers and the gauges
Operating temperature 0 °C to 40 °C
aredisplayed and also signalled to the corresponding
Storage temperature -40 °C to 60 °C
outputs.
Max. rel. humidity 80 % non-condensing
1.3.2 THERMOVAC method of
1.2.10 RS 232 C interface
measurement (Pirani)
Baud rate 2400, fixed This method of measurement for the pressure range of
-4
5·10 to 1000 mbar makes use of the thermal conduc-
Data format ASCII character set
tivity of the residual gas. In order to obtain response
one start bit,
times which are as short as possible, all THERMOVAC
seven data bits + one space bit,
instruments rely exclusively on the principle of the con-
one stop bit
trolled Pirani gauge.
no parity
The filament is part of a Wheatstone bridge. If the tem-
Signal level ± 8 V approx.
perature of the filament changes due to a change in the
pressure, the bridge then becomes unbalanced. A fast-
Operating modes for the single- and multi-channel
acting control circuit then adapts the heating power
instruments of the A-series
applied to the filament, so that filament temperature
- Talk-only operation automatic output of
again reaches its nominal value and the bridge is reba-
measurement data every 10 s, in the
lanced. The pressure readings obtained in this way
event of a fault output ofthe status message
depend on the type of gas. Normally the readings of the
instead of the measurement data
instruments are calibrated for nitrogen or air, with Argon
- Remote operation data acquisition,
being selectable.
status messages, parameter entry
(depending on the total pressure gauge used)
The mechanical design of the gauge heads is very rug-
ged and so, that dust cannot enter the electronics hou-
Connection plug Sub-D socket, 9-way
sing. Six types of sensors are available:
Active lines TxD (Transmit data) on pin 2
- TR 201 DN 10 KF / TR 211 DN 16 KF with tungsten fila-
RxD (Receive data) on pin 3
ment for all standard applications
GND signal ground on pin 5
- TR 205 DN 16 CF which are bakeable and
- TR 206 DN 10 KF / TR 216 DN 16 KF with a nickel / pla-
Status signal DTR (Data terminal ready) on pin 6
tinum filament and of a corrosion protected design.
RTS (Request to send) on pin 8
Shield pin 9
1.3.3 PENNINGVAC method of measure-
Max. cable length 20 m
ment (cold cathode)
To measure the pressure a gas discharge is ignited wit-
hin the sensor by applying a high voltage. The resulting
ion current is outputed as a signal which is proportional
6
to the prevailing pressure. A new sensor design permits
1.4.2 Accessories
safe and reliable measurement operation of this „inver-
Cat. No.
-9
ted Penning“ in the pressure range between 1·10 mbar
THERMOVAC gauge head TR 201, DN 10 KF 162 02
-2
and 1·10 mbar. This sensor is available fitted with either
THERMOVAC gauge head TR 201, 1/8“ NPT 896 72
a KF or a CF flange. The special alloy used for the
THERMOVAC gauge head TR 205, DN 16 CF 158 50
magnet permits bakeing out of the sensor (with CF flan-
THERMOVAC gauge head TR 206, DN 10 KF 162 31
ge) up to 250 °C without having to remove the magnet.
THERMOVAC gauge head TR 211, DN 16 KF 157 85
The rugged electrodes may be simply taken out and ins-
THERMOVAC gauge head TR 211, 1/8“ NPT 896 33
erted again for cleaning or replacement.
THERMOVAC gauge head TR 216, DN 16 KF 157 87
Replacement sensing cell TR 201, DN 10 KF 162 09
1.3.4 RS 232 C interface
Replacement sensing cell TR 201, 1/8“ NPT 896 76
Replacement sensing cell TR 205, DN 16 CF 158 51
The interface will operate either in connection with a prin-
ter, remote control terminal or a computer. Replacement sensing cell TR 206, DN 10 KF 162 32
Replacement sensing cell TR 211, DN 16 KF 157 75
The RS 232 C interface is suitable for transmitting data
Replacement sensing cell TR 211, 1/8“ NPT 896 34
over distances up to 20 m. By using converters such as
for example RS 422 or fibre optical links, much greater Replacement sensing cell TR 216, DN 16 KF 157 77
distances can be covered. Moreover, with the aid of a
Gauge head cable 5 m for TR gauges 162 26
modem (modulator for transmission in the audio range
Gauge head cable 10 m for TR gauges 162 27
and demodulator for converting the signals back to digi-
Gauge head cable 20 m for TR gauges 162 28
tal) data may be transmitted down phone lines.
Extension cable 20 m for TR gauges 160 77
THERMOVAC gauge head simulator T 210 157 10
PENNINGVAC gauge head PR 25,DN 25 KF 157 54
1.4 Equipment
PENNINGVAC gauge head PR 35,DN 40 KF 157 51
PENNINGVAC gauge head PR 36,DN 40 CF 157 53
1.4.1 Supplied equipment
Gauge head cable 5 m for PR gauges 162 88
Cat. No.
Gauge head cable 10 m for PR gauges 162 89
COMBIVAC CM 31
Gauge head cable 20 m for PR gauges 157 56
Europe 230 V; mbar 157 89
Gauge head cables up to 100 m upon request
USA 120 V; Torr 896 89
Japan 100 V; Torr 897 89
Test gauge T 35 (PENNINGVAC) 157 62
Operating Instructions GA 09.504
Installation frame 19“, 3 HU 161 00
Cover panel 1/4 19“, 3 HU 161 02
Ref. No.
2 fuses T 0.315 A 520 25 310
2 fuses T 0.630 A 520 25 313
Power cord 2 m (depending on CM 31 version)
Europe 200 59 051
USA / Japan 200 27 550
Two 4-way screw terminal strips 200 60 806
One 5-way screw terminal strip 200 60 807
Three 8-way screw terminal strips 200 60 808
Four screws M 3 x 8 mm 200 80 029
Support stand for table use 200 60 900
Four adhesive feet 229 48 120
7
2 Operation
(TM channel) „TEST“ and „noSEn“ will be displayed
2.1 Start-up
alternatingly for 1 to 5 seconds. While this is in progress
the instrument is trying to determine which THERMO-
Please refer to the technical data of this instrument to
VAC sensor is connected to the TM channel.
determine whether or not this instrument suits your appli-
cation.
For safety reasons please check the following before
connecting the instrument to the AC power:
2.2 Electrical connection
- The correct line voltage setting (on the rear)
see Fig. 1.
Caution Before applying power to the instrument
If it has to be changed, refer to Section 2.2.1
for the first time, please carry out the fol-
- The use of the correct line fuse.
lowing steps:
For this refer to Section 2.2.1.
- Check and if required adapt the line
The COMBIVAC CM 31 is supplied ready for immediate voltage setting to the local line voltage.
use. -Check and if required exchange the
built-in line fuse (see Section 2.2.1).
Connect the gauge head via the corresponding gauge
head cable (refer also to Section 2.4).
The line voltage of the CM 31 is set to the value which is
indicated upright on the AC power socket (legible) and
Connect the AC power voltage to the CM 31 via the sup-
which points to the arrow (1/3) on the right side.
plied power cord. After applying power to the instrument
it runs a self test. When in progress, all display elements
Integrated into the AC power socket is the line fuse and
come on briefly.
the voltage selector for 4 different line voltage ranges.
Depending on the operational status of your vacuum
The line voltage is applied to the instrument via the sup-
system you will now get a corresponding pressure rea-
plied detachable power cord. An AC power socket (7/5)
ding. Via keys TM 1, TM 2 or PM it is possible to select
is provided on the rear for connection of the power cord.
the required gauge head.
Warning Only 3-conductor power cords with
Check or adjust the equipment parameters as appro-
safety ground may be used. The instru-
priate according to Section 2.3.9.
ment may not be operated with an un-
connected safety ground conductor.
Note
After having applied the mains voltage and after comple-
tion of the self test or after having exchanged a sensor
Key to fig. 1
1 AC power socket
2 Fuse insert
3 Arrow for indication of the line voltage setting
4 Slot for applying a screwdriver
Fig. 1 AC power socket (line voltage setting 230 V)
8
2.2.1 Changing the line voltage setting and
2.3 Controls and their
exchanging the fuses
functions
To change the line voltage setting or
exchange a fuse the power cord must be
An overview of the placement of the controls and the dis-
disconnected first.
play elements is given in Fig. 2.
To change the line voltage setting use a screwdriver to
The instrument is operated via 7 keys.
remove the fuse holder (1/2) next to the socket (1/1).
Note
Change the orientation of the fuse holder so that the
When pressing a key which has no function in that parti-
required voltage can be read upright pointing to the mark
cular operating mode, symbol (2/9) comes on.
(1/3). Insert the fuse holder (1/2), while at the same time
maintaining the orientation found.
Having changed the line voltage setting one of the follo-
2.3.1 Bar graph display
wing fuses is required:
The bar graph display (2/7) displays the measured value
- 100 V: AC fuse T 0.63 A (Ş 5 x 20 mm)
in a analog manner with a log. scale. The arrows at both
- 120 V: AC fuse T 0.63 A (Ş 5 x 20 mm)
ends of the bar graph display indicate an overrange or
- 200 V: AC fuse T 0.315 A (Ş 5 x 20 mm)
underrange condition. Depending on the measurement
- 230 V: AC fuse T 0.315 A (Ş 5 x 20 mm)
principle either the upper scale (exponents -3 to +3) or
the lower scale (exponents -8 to -2) will be in use. When
selecting the measurement unit Pa or Micron the scales
will remain unmarked.
Key to fig. 2
1Key HV
2Key PM
3 Key TM 2
4 Key TM 1
5 Status display area
6 Over- and underrange indicators
7 Bar graph display
8 Digital display
9 Indicator referring to the Operating
Instructions
10 Measurement units
11 Equipment fault
12 Key PARA
13 Increment parameter
14 Decrement parameter
Fig. 2 Arrangement of controls and displays
9
Trigger and equipment modes are indicated in the status
2.3.2 Digital display
display area (3/1). These are related to the keys below
The digital display (3/3) is used to digitally display the
which are used to select the measurement channel. An
pressure with respect to the selected measurement unit.
overview giving the arrangement of the trigger and
equipment status modes is shown in Fig. 3. Details are
In case of Torr, Pa and mbar the readout is composed of
described briefly in the following.
mantissa and exponent.
Trigger 1 (< 1 >)
When selecting Micron the readout is composed only of
The triggers as indicated in the status display area and
5 digits. Above 99000 Micron the readout automatically
2
by the status displays relate to the measurement chan-
changes over to Torr. 1.0·10 Torr is indicated, and all
nel which is selected by the key below.
subsequent readings will be in Torr.
1
When the pressure drops below to 9.0·10 Torr the dis- If the left arrow of the trigger display is on, this indicates
play will then automatically return to the unit Micron. The that the actual pressure is lower than the trigger set
CM 31 will then display 90000 Micron and all subsequent point.
readings will be in Micron again. The lowest displayed
If the right arrow of the trigger display is on, this indica-
reading is 1 Micron.
tes that the actual pressure is higher than the trigger set
point.
2.3.3 Measurement units
Trigger 2 (< 2 >)
The same as for trigger 1 also applies to trigger 2.
Located to the right of the digital display is the display for
the pressure units (3/4). Only that unit will be indicated
FAIL
which has previously been selected via parameter page The word FAIL comes on in the event of a sensor failure;
6. see Section 2.9.
DISP
When selecting the Micron pressure unit the reading will
DISP indicates the channel, the values of which are just
change between Micron and Torr depending on the pres-
being displayed. Here for example TM 1, TM 2 or PM.
sure; (see Section 2.3.2).
HV
The HV (high vacuum gauge) message comes on, when
2.3.4 Status display area
the high voltage for the PM channel is present.
The status display area (3/1) for the measurement chan-
CORR
nels is located between the area of the keys and the
The CORR message comes on, when a different type of
pressure display. gas other than the standard gas „air / nitrogen“ has been
Key to fig. 3
1 Status display area
2 Bar graph display
3 Digital display
4 Measurement units
Fig. 3 Partial view of the front panel
10
selected on parameter page 5.
displayed and the triggers will not be active.
However, if these conditions have been met once after
LOCK
switching on, the instrument will indicate that it is ready.
The LOCK message comes on, when the entry of para-
Thereafter the triggers are active, independently of the
meters via the keyboard has been locked. For this refer
pressure, cable or sensor conditions until the high volta-
to Section 2.3.9.2.
ge is switched off again.
PARA
The PARA message comes on, when entering instru-
Warning Even in the presence of an error messa-
ment parameters. The entered instrument parameters
ge the PM high voltage (3.3 kV) will
apply to the currently selected and displayed measure-
remain switched on.
ment channel.
Note
2.3.5 Keys TM 1, TM 2 and PM
- PENNINGVAC gauges should only be switched on at
-2
Pressing key TM 1, TM 2 or PM selects the correspon-
pressures below 1·10 mbar. Due to the physical prin-
ding measurement channel. The pressure of the selected
ciple employed, any PENNINGVAC gauge can be swit-
measurement channel is then displayed by displays (3/2)
ched on at higher pressures (HV-on).
- After switching on the high tension, the gas discharge
and (3/3).
is started in the sensor with a voltage of 3.3 kV. After
The trigger and chart recorder outputs of all channels
successful ignition this voltage is then reduced to an
present is not influenced in any way by the selection of a
1.6 kV operating level. This increases the service life of
particular measurement channel.
the sensors, in particular in connection with argon
atmospheres.
2.3.6 Key HV
When switching on the PENNINGVAC gauge at pressu-
-2
res over 1·10 mbar the display will indicate an unspeci-
The HV key (4/1) is used to switch the high voltage for
fied value. Prolonged operation in this unpermitted pres-
the PM channel on and off.
sure range may lead to increased contamination of the
After switching on the PM high voltage a value is indica-
gauge.
ted immediately, provided the PM channel has been sel-
More details on the operation of this key are given on
ected. 10 s after switching on the high voltage the instru-
parameter page 7 „Switching the PENNINGVAC on and
ment checks whether the gauge tube has ignited and
-9
off automatically“.
whether the pressure has risen above 5·10 mbar. As
long as these conditions have not been met „FAIL“ will be
Key to fig. 4
1Key HV
2Key PM
3 Key TM 2
4 Key TM 1
5 Status display area
6 Key decrement
6
Fig. 4 Partial view of the front panel
11
2.3.9.1 Checking and setting up of the equipment
2.3.7 Key Decrement
parameters
The decrement key (5/3) is used for setting up the trig-
The PARA (5/1) key is pressed when wanting to check or
gers and other instrument parameters. Each time this
change the settings of the various instrument parame-
key is pressed, the displayed mode is decremented by 1;
ters. The PARA message in the status display area
in the case of numeric values the least significant digit is
comes on and the first parameter page of the currently
decremented by 1.
selected measurement channel is displayed.
When pressing the decrement key for more than 2 s
Pressing the PARA key once more selects the next para-
while setting up the triggers, the range of values will pass
meter page.
through rapidly.
The currently selected parameter page number is indi-
cated by the bar graph display (2/7). The number of
2.3.8 Key Increment
active bars (starting from the right hand side) corre-
sponds to the number of the currently selected parame-
The increment key (5/2) is used for setting up the triggers
ter page. For technical reasons only parameter page
and other instrument parameters. Each time this key is
numbers starting with No. 3 are displayed in this way, i.e.:
pressed, the displayed mode is incremented by 1; in the
3 bars correspond to parameter page 3,
case of numeric values the least significant digit is incre-
4 bars correspond to parameter page 4 etc.
mented by 1.
On the individual parameter pages, the parameters
When pressing the increment key for more than 2 s while
themselves may be changed by the decrement key (5/3)
setting up the triggers, the range of values will pass
and the increment key (5/2). Any entries made via the
through rapidly.
decrement (5/3) or increment (5/2) keys become imme-
diately effective.
2.3.9 Key PARA
Note
When no key is operated for approximately 1 minute the
The „PARA“ key (5/1) is used for switching the instru-
CM 31 will automatically switch back to the measure-
ment to the parameter mode, where individual parame-
ment mode, whereby the settings which were displayed
ters of the instrument may be checked, set up or where
at the time of leaving the parameter page are stored.
the parameter settings may be locked.
Note
If no changes in the display are noticeable when opera-
The preselected setting (see setting AUTO.1) for pressu-
ting the decrement (5/3) or increment (5/2) keys, access
re dependent switching of the PENNINGVAC channel
to the parameter entry mode has been locked before-
through Thermovac channel 2 is displayed at pressures
hand. This condition is also indicated by the LOCK mes-
above (below) the threshold of the TM 2 channel (PM
sage.
channel). When then pressing the key PM (TM 2) the
The parameter mode may be left by
corresponding pressure reading of the PM channel (TM
- operating any measurement channel selection key or
2 channel) will be displayed. After 1 minute the display
- automatically after displaying the last parameter page.
will automatically revert back to the TM 2 channel (PM
channel).
All changes will become stored and active automatically.
Key to fig. 5
1 Key PARA
2 Increment parameter
3 Decrement parameter
Fig. 5 Partial view of the front panel
12
A difference is made between two levels of parameters. two trigger modes.
L Level trigger
Parameter level 1
Both trigger outputs are operated independently of
Entering the parameter level 1 the following will be
each other. Thresholds may be set up either within
shown:
-8 -2
the range between 1·10 and 1·10 mbar for PM
measurement channel or for TM measurement chan-
Page 1
-3
nel between 5·10 and 500 mbar.
The current trigger relays value for trigger 1.
Pressure dependent hysteresis is shown in tables 3
and 4 or tables 7 and 8 of Section 2.10.
If no sensor, or a faulty sensor is connected to the THER-
I Interval trigger
MOVAC channel or if the high voltage for the PENNING-
Operation of the two triggers (trigger 1 and trigger 2)
VAC channel is off, the two arrows of trigger 1 will be
is linked. When entering the thresholds the following
flashing.
condition must be met:
When the TM-channel is ready, or if the PM high voltage
Trigger threshold 1 < trigger threshold 2
is on, the left hand arrow will flash when the current trig-
The set up interval (difference between threshold 1
ger value is lower than the measured pressure.
and 2) cannot decrease 5 % of the value for threshold
1.
When the THERMOVAC channel is ready, or if the PM
In this mode, output 2 operates as a level trigger and
high voltage is on, only the right hand arrow will flash
output 1 operates as the interval trigger.
when the current trigger value is higher than the measu-
red pressure.
When switching from the level trigger mode to the inter-
val trigger mode threshold 1 must be < threshold 2. If it
Trigger levels when shipped:
-3 -3
is not
TM 5·10 mbar / 3.7·10 Torr
-8 -9
PM 1·10 mbar / 7.5·10 Torr
L (for Level) and the symbol
Page 2
will be displayed referring to the Operating Instructions.
Current trigger relays value for trigger 2.
At the same time the digits 1 and 2 of the < 1 > or < 2 >
Here the same applies as for page 1.
display will be displayed flashing.
Page 3 The condition of trigger threshold 1 < trigger threshold 2
Setting up the operating modes „Level trigger“ or „Inter- must be met first before switching over.
val trigger“.
Setting when shipped: L (Level trigger)
The diagrams given in Fig. 6 provide an overview of the
Fig. 6 Level trigger and interval trigger diagram
13
Page 4 Page 7 for the THERMOVAC channel
Correction for the type of gas Filament material of the connected sensor (FILAMENT).
GAS.n2 � Air / Nitrogen (N ) FIL tu Tungsten TR 211, TR 201 and TR 205
2
FIL ni Nickel TR 206
GAS.Ar � Argon
FIL pt Platinum TR 216
Setting when shipped: Air / Nitrogen
Setting when shipped: FIL tu
For a more accurate determination of the true pressure
for gases other than air or N in the system, the display-
2
ed value has to be multiplied by a factor which is cha-
Page 7 for the PENNINGVAC channel
racteristic for the other type of gas.
Instrument parameter page 7 is used for automatic, pres-
Gas Correction factorr
sure dependent switching of the PENNINGVAC channel.
————————————————————————
O 0,88 The correction factors
2 After calling up instrument parameter page 7 the display
He 4,7 refer to the setting
will indicate AUTO.0 or AUTO.1
H 2,28 for GAS.n2 in each case.
2
Ne 2,16 AUTO.0 The high voltage may be switched on and off
via the „HV“ key or via the external input HV-
ON. The status of the PENNINGVAC channel
Page 5
is not controlled via the measurement chan-
Software release number and locking (LOCK); refer also
nel TM 2.
to Section 2.3.9.2.
AUTO.1 Depending on the pressure the high voltage
is switched on and off through measurement
The transition from the parameter mode to the normal
channel TM 2. The high voltage may be swit-
measurement mode is made by pressing the key of the
ched off and on at any time by pressing the
desired measurement channel (TM 1, TM 2 or PM) or by
„HV“ key or through the external input HV-
pressing the PARA key.
-2
ON, provided the pressure is below 1·10
mbar.
Parameter level 2
The threshold pressure for
Parameter level 2 is called up by pressing the incre-
- switching on the high voltage is:
ment (2/13) key when parameter page 5 is being dis-
-2 -3
< 1·10 mbar = 7.5·10 Torr = 1 Pa = 8 Micron
played.
- switching off the high voltage is:
-2 -2
Parameter level 2 contains the following:
> 5·10 mbar = 3.75·10 Torr = 5 Pa = 37 Micron
In the case of automatic operation, the pressure display
is switched to the best measurement channel (TM 2/PM)
Page 6
depending on the pressure. In the event of a faulty sen-
Units of measurement TORR, PA, MICRON, MBAR
sor in channel TM 2 the high voltage has to be switched
The currently active unit flashes.
on by the operator.
Note
The display switches from the THERMOVAC channel to
The unit which is set up here, applies to all three connec-
-3
the PENNINGVAC channel at a pressure of < 3·10
ted measurement channels.
-3
mbar (2.5·10 Torr) and from the PENNINGVAC channel
-3
to the THERMOVAC channel at a pressure of > 5·10
Supplied condition: MBAR (230 V model)
mbar.
TORR (100 V or 120 V model)
Having actuated the keybord the change-over can be
delayed by 1 min.
Even when selecting the unit „MICRON“ for a TM chan-
nel, the pressure readings for the PM channel will always
Setting when shipped: AUTO.1
be in „TORR“.
If the TM channels are to be set to „MICRON“ this can
Page 8
not be done via the PM channel. This is only possible
Equipment parameter page 8 is used for switching the
when having previously selected a TM channel.
numerical display from standard resolution (2-digit man-
tissa) to high resolution (3-digit mantissa).
-2
Page 7
Std Standard resolution 3.0
-2
HIGH High resolution 3.00
Note
On parameter page 7 of instrument parameter level 2 For this refer to tables 3 and 4 in Section 2.10.1 or tables
there are different displays for the THERMOVAC channel 7 and 8 in Section 2.10.2.
and the PENNINGVAC channel.
14
Page 9 Page 10 for the THERMOVAC measurement
channel (TM)
Note
Adjustment of the analogue output (for this also see Sec-
On parameter page 9 of instrument parameter level 2
tion 2.10.2).
there are different displays for the THERMOVAC channel
and the PENNINGVAC channel. Eight different ranges can be set up.
Logarithmic output characteristic:
-3 -3
Ano : log 1·10 - 1000 mbar (1.67 V / decade)
Page 9 for the THERMOVAC channel (TM)
-4 -4
Ano : log 5·10 - 1000 mbar (1.587 V / decade)
Cable length adjustment for the THERMOVAC gauges.
Linear output characteristic:
Note
0 0,1 1 ... 5 V ... 10 V
Equipment parameter page 9 is used to enter the length
of the cable for THERMOVAC gauge heads.
-2 -4 -3 -2
Anl : 1·10 1·10 1·10 mbar
-1 -3 -2 -1
Anl : 1·10 1·10 1·10 mbar
After calling up parameter page 9 the display will indica- +0 -2 -1 +0
Anl : 1·10 1·10 1·10 mbar
+1 -1 +0 1
te „CL xxx“.
Anl : 1·10 1·10 1·10 mbar
+2 +0 1 2
CL Cable length Anl : 1·10 1·10 1·10 mbar
+3 1 2 3
Anl : 1·10 1·10 1·10 mbar
xxx Length in m
By operating the increment or decrement keys it is pos-
sible to enter cable lengths in the range between 0 m and
100 m in 5 m increments (5 m, 10 m, 15 m, 20 m, 25 m
2.3.9.2 Locking of parameter settings
etc.). The default setting is 5 m.
By locking the parameter settings, the entered and sto-
Note
red parameters may be protected against any unquali-
Intermediate values must be rounded off.
fied changes.
2
The values only apply to standard cables 6 x 0.14 mm .
When parameter page 5 is displayed (software release
number) pressing the PARA key of the TM 1 measure-
Note
ment channel for more than 5 seconds will lock up all
When combining a TR 211 gauge from series B1 or later
parameters and prevent any further parameter changes.
or a TR 215 / 216 and TM channel from software revisi-
The „LOCK“ message will come on. With the „LOCK“
on 2.0 or later the lenght of the gauge head cable is auto-
message on, it is only possible to check the settings of
matically accounted for by means of automatic cable
the parameters. However, keys TM 1, TM 2 and PM
lenght alignment. „CLA“ will be displayed on parameter
remain accessible.
page 9.
Unlocking is only possible by displaying the number of
the software release of the TM 1 measurement channel
once more (parameter page 5) and by pressing the
Page 9 for the PENNINGVAC measurement
PARA key for more than 5 seconds.
channel (PM)
Adjustment of the analogue output (for this also see Sec-
tion 2.10.3).
Seven different ranges can be set up.
Logarithmic output characteristic:
-8 -9 -2
Ano : log 1·10 - 1·10 mbar (1.43 V / decade)
Linear output characteristic:
0 0,1 1 ... 5 V ... 10 V
-7 -9 -8 -7
Anl : 1·10 1·10 1·10 mbar
-6 -8 -7 -6
Anl : 1·10 1·10 1·10 mbar
-5 -7 -6 -5
Anl : 1·10 1·10 1·10 mbar
-4 -6 -5 -4
Anl : 1·10 1·10 1·10 mbar
-3 -5 -4 -3
Anl : 1·10 1·10 1·10 mbar
-2 -4 -3 -2
Anl
: 1·10 1·10 1·10 mbar
15
2.4.3 Connection of the
2.4 Supply and socket
PENNINGVAC gauge
connections on the rear
The PENNINGVAC sensor is supplied
with a high tension via socket (7/9).
All supply connections and sockets are located on the
(3.3 kV ignition voltage, 1.6 kV operating
rear. These are shown in Fig. 7.
voltage; R = 7.7 MΩ)
i
This socket is wired as follows:
2.4.1 AC power supply
Inner conductor Positive high voltage
Outer conductor Return and screen
Connection to the AC power and selection of a different
line voltage setting and exchanging the line fuse of the
CM 31 is described in Section 2.2.
2.4.4 Screw terminal outputs for the THER-
MOVAC channels
2.4.2 Connection of the
The connections are carried via two terminal strips. One
THERMOVAC gauge
4-way terminal strip (7/6) or (7/7) above, and one 8-way
terminal strip (7/3) or (7/12) under the gauge head
The THERMOVAC gauge heads for measurement chan-
connector. Those terminal strips which are above each
nels TM 1 and TM 2 are connected to sockets (7/4) and
other are always related to one THERMOVAC channel.
(7/10) respectively.
The wiring is the same for both measurement channels
but the numbering of the pins is different.
Key to fig. 7
1 Ground (potential equalization for CM 31)
2 Connection for RS 232 C interface
3 Connection for channel TM 1 (triggers 1
and 2 and ready indicator)
4 Connection for THERMOVAC gauge head
(TM 1 channel)
5 AC power socket
6 Connection for channel TM 1
(Chart recorder output)
7 Connection for channel TM 2
(Chart recorder output)
8 Connection for channel PM (Chart recor-
der output and external HV ON/OFF)
9 Connection for PENNINGVAC gauge head
10 Connection for THERMOVAC gauge head
(TM 2 channel)
11 Connection for channel PM (triggers 1 and
2 and ready status indicator)
12 Connection for channel TM 2 (triggers 1
and 2 and ready status indicator)
S1 = TM 1 channel
S2 = TM 2 channel
Note
The designations of the terminals shown in this
illustration correspond to the DIN regulations.
CE
Due to limited space the figures are neither
indicated at the back of the instrument nor on
the terminal strip.
Fig. 7 CM 31 - Rear view
16
The 4-way terminal strip is wired as follows (Fig. 7) The 8-way terminal strip is wired as follows (Fig. 7).
TM 1 TM 2 Signal PM Signal Contact symbol
———————————————————————— ————————————————————————
11 111 Trigger threshold (TRG) in preparation 182 C Ready
12 112 Trigger threshold (ground) in preparat.
181 n.o.(open)
31 131 Chart recorder output 0 to 10 V (REC)
141 n.c.(closed)
32 132 Chart recorder output (ground)
142 C Trigger 1
The 8-way terminal strip is wired as follows (Fig.7)
143 n.o.(open)
TM 1 TM 2 Signal Contact symbol 151 n.c.(closed)
————————————————————————
152 C Trigger 2
82 85 C Ready
153 n.o.(open)
83 86 n.o. (open)
n.c. Normally closed (resting contact)
41 44 n.c. (closed)
n.o. Normally open (operating contact)
42 45 C Trigger 1
C Common (Centre contact)
43 46 n.o.(open)
51 54 n.c.(closed)
52 55 C Trigger 2
2.4.6 RS 232 C interface
53 56 n.o.(open)
The connections are made through a 9-way Sub-D
n.c. Normally closed (resting contact)
connector (3/2).
n.o Normally open (operating contact)
C Common (Centre contact)
The interface socket on the A-series instruments is wired
as follows:
Note
Pin No. Designation Remarks
The 8-way socket is specified for a max. permissible ope-
————————————————————————
rating voltage of 250 V AC and 50/60 Hz with reference
1 Not used
to the safety ground conductor.
2 TxD Transmission data (output)
3 RxD Receive data (input)
4 Not used
2.4.5 Screw terminal outputs for the PEN-
5 GND Reference ground for signals
NINGVAC channel
6 DTR Is pulled high (+ 8 V approx.)
when the mains voltage is
The connections are carried via two terminal strips. One
applied to the instrument.
5-way terminal strip (7/8) above, and one 8-way terminal
7 Not used
strip (7/11) under the gauge head connector.
8 RTS Is pulled high (+ 8 V approx.)
when the mains voltage is
The 5-way terminal strip is wired as follows (Fig. 7)
applied to the instrument.
PM Signal 9 Shield Ground connection for cable
————————————————————————
shield
233 + 24 approx. (R = 680 Ω)
i
for external contact on 211
211 HV control input for PM (HV ON)
212 Ground for HV control input
231 Chart recorder output 0 to 10 V (REC)
232 Ground for chart recorder output
For the PENNINGVAC channel the wiring of the 8-way
terminal strip (7/11) is the same as for the 8-way termi-
nal strips (7/3) and (7/12) for the THERMOVAC channels
but the numbering of the pins is different!
17
2.5.4 Using the CM 31 as a table-top
2.5 Installing the instrument
instrument
The CM 31 has been designed to operate reliably under
When using the CM 31 as a table-top instrument a sup-
all normally encountered industrial conditions (see Sec-
port stand (Ref. No. 200 60 900) may be fitted to the bot-
tion 1.2.9).
tom of the instrument. The support is inserted from the
The instrument is supplied with a rugged table-top hou-
rear into the lowermost groove of the corner profile and
sing. The metal housing is provided with ventilation slits
is then pushed to the front until it engages.
on the top and bottom. When installing the instrument
The four adhesive feet (Ref. No. 229 48 120) are atta-
within a cabinet, sufficient ventilation must be ensured.
ched under the support stand and under the rear of the
For this, also refer to Section 1.2.9 „Ambient conditions“.
instrument.
The metal housing also reliably protects the instrument
against electromagnetic interferences (EMI). However,
the CM 31 should be installed away from strong magne-
tic fields, large transformers and motors etc., so that the
2.6 Checking the equipment
instrument cannot be influenced.
functions
2.5.1 Installation
2.6.1 TM measurement channels
Note
The THERMOVAC measurement channels are supplied
When installing the CM 31, care should be taken so as
factory-aligned and does not require any maintenance.
not to obstruct the ventilation slits in any way. Also ensu-
re a sufficient throughput of air.
Test gauge T 210 may be used to check important equip-
ment functions. The test gauge is a gauge head simula-
tor for a THERMOVAC gauge head, but it does not sup-
2.5.2 Rack installation
ply calibration values.
The CM 31 is delivered for installation into a 19“ rack By operating the potentiometer it is possible to simulate
-4
having 3 height units. any pressure within the range between 5·10 mbar and
atmosphere.
It is inserted into the rack and secured by screwing in
This is especially useful for checking trigger thresholds
four mounting screws through the holes on front panel.
and trigger reactions in vacuum systems since this
Mounting screws are included.
checking can be carried out without starting up the vacu-
um pumps.
2.5.3 Panel installation
In the event of a fault in the measurement system test
gauge T 210 may be used to determine whether the fault
The CM 31 is delivered ready for panel mounting. The
is with the gauge head, the gauge head cable or the CM
required panel cut out is given in Fig. 8.
31 itself.
Fig. 8 Dimensional drawing and panel cutout (dimensions in mm)
18
2.6.2 PM measurement channel
The PENNINGVAC measurement channel is supplied
Alignment
factory-aligned and does not require any maintenance.
too high
Test gauge T 35 may be used to check important equip-
ment functions. The test gauge is a gauge head simula-
tor for the PENNINGVAC gauge head. Different pressu-
Alignment
re values are simulated via integrated resistors and are
exact
available at three plug sockets.
The test values are indicated on the gauge head.
In the event of a fault in the measurement system test
Alignment
gauge T 35 may be used to determine whether the fault
too low
is with the gauge head, the gauge head cable or the CM
31 itself.
Vent the vacuum system once more and check the
100 % setting once more. If required correct any possi-
ble deviations.
2.7 Alignment of the THER-
If it was necessary to correct the 100 % setting, Zero ali-
MOVAC gauge heads
gnment must be repeated.
Note
Aging and contamination of the filament within the gauge
With the Torr setting the bar +3 is permanently switched
head will impair the accuracy of the pressure readings.
off.
Therefore it is recommended to align the THERMOVAC
gauge heads from time to time when appropriate. This
alignment is carried out as follows:
Vent the vacuum system and adjust the 100 % potentio-
2.8 Switching off
meter on the THERMOVAC gauge head so that the fol-
lowing bargraph display is obtained:
The instrument is switched off simply by disconnecting
the power cord.
Alignment
too high
Alignment
exact
Alignment
too low
Note
In order to ensure a stable but none-the-less accurate
alignment of the 100 % value, the alignment potentiome-
ter (100 %) should be turned further by 90° in the clock-
wise direction after the last segment of the bargraph has
come on. When doing so, the right arrow (overrange)
may just come on.
-4
Evacuate the vacuum system down to a pressure 5·10
mbar and then adjust the „0“ potentiometer on the
THERMOVAC gauge head so that the following bargraph
display is obtained:
19
This symbol indicates that the CM 31 should
2.9 Status messages
be operated according to the Operating
Instructions as the instrument has been opera-
The COMBIVAC CM 31 is able to display a variety of sta-
ted incorrectly.
tus messages.
For example.: L
FAIL FAIL indicates that there is a fault in the sensor.
The triggers are set to the interval mode, but
If a fault is present when selecting a THER- threshold 1 is higher or equal to threshold 2.
MOVAC measurement channel, one of the fol-
This symbol will also appear when operating a
lowing error messages is displayed:
key which - in that particular operating mode -
No sensor has no function. This symbol is automatically
Fault cause: erased after some time.
- Gauge head cable disconnected
- Damaged cable This symbol indicates the presence of a fault
within the instrument.
- Sensor can not be identified
- Missing sensor
FAULT
Filament broken
Fault cause
Initialization text when changing the sensor for
- Filament faulty
the TM channel.
FAIL The following applies to the PENNINGVAC
The following applies to the PENNINGVAC channel:
channel:
Off
HV (high voltage) was switched on at a pres-
-9 -7
sure below 5·10 mbar / Torr (5·10 Pa).
Cause:
Interrupted gauge head cable. - High voltage has not been switched on.
Sensor not connected.
Note
When switching on the high voltage the mes-
sage „FAIL“ will appear after 10 s until the gau-
ge tube has ignited and provided the pressure
-9
mbar.
exceeds 5·10
FAULT A fault has occurred during the execution of the
microprocessor program due to exceptionally
strong electromagnetic interferences or a brief
mains failure (1 to 3 seconds), for example. In
this case the instrument or the affected mea-
surement channel is reset to a stable through a
Watchdog function:
- Display: Status FAULT, all other segments
may flash
- Chart recorder output is set high to 10.2 to
10.6 V.
- The contact of the Ready relay is opened,
trigger relays are set to the rest position.
Remedy:
Switch the instrument off (disconnect from the
mains). Reconnect after 5 s at the earliest.
20
Equations for the chart recorder output (Ua) relating to
2.10 Chart recorder output
the THERMOVAC measurement channel; see Table 2:
tables
-3
For Ano
10
U = — ( log p + 3)
a
2.10.1 Chart recorder output table for
6
TM measurement channel
-4
For Ano
Table 1 Response of the chart recorder output, trigger relay and
U = 1,58704·log p + 5,23887
ready indicator in the TM channel
a
Trigger relay Chart recor-
TMchannel TM resdy +3
For Anl
mode contact operating der output
p
contact
U = ——— 10
a
p
open --
AC power „OFF“ open max
open 10.2 - 10.6 V
Immediately after open
+2
For Anl
AC power „ON“
p
open or closed 0 to 10 V
AC power „ON“ closed
U = ——— 100
a
depending on
after 1 s approx.
p
max
the pressure
and a valid measu-
rement value
+1
For Anl
open 10.2 - 10.6 V
broken filament open
p
U = ——— 1 000
open 10.2 - 10.6 V
No sensor open a
p
connected max
0
For Anl
p
Table 2 Response of the TM pressure readout at the chart recorder
U = ——— 10 000
a
-3
output for the setting Ano .
p
max
mbar Pa Torr Micron Chart rec.
output volt. -1
Für Anl
-3 -1 -3
p
1.0·10 1.0·10 1.0·10 1 0.00 V
U = ——— 100 000
-3 -1 -3 a
2.0·10 2.0·10 2.0·10 2 0.50 V
p
-3 -1 -3 max
5.0·10 5.0·10 5.0·10 5 1.16 V
-3 -1 -3
9.0·10 9.0·10 9.0·10 9 1.59 V
-2
For Anl
-2 0 -2
1.0·10 1.0·10 1.0·10 10 1.67 V
p
-2 0 -2
2.0·10 2.0·10 2.0·10 20 2.17 V
U = ——— 1 000 000
a
-2 0 -2
5.0·10 5.0·10 5.0·10 50 2.83 V
p
max
-2 0 -2
9.0·10 9.0·10 9.0·10 90 3.26 V
-1 1 -1
1.0·10 1.0·10 1.0·10 100 3.33 V
-1 1 -1
2.0·10 2.0·10 2.0·10 200 3.84 V
U Chart recorder output voltage in V
a
-1 1 -1
5.0·10 5.0·10 5.0·10 500 4.50 V
and U = 10 V
-1 1 -1 a max
9.0·10 9.0·10 9.0·10 900 4.92 V
p Pressure in mbar or Torr
0 2 0
1.0·10 1.0·10 1.0·10 1000 5.00 V
0 2 0
2.0·10 2.0·10 2.0·10 2000 5.50 V
Example
0 2 0
5.0·10 5.0·10 5.0·10 5000 6.16 V
-2
0 2 0 p = 7·10 mbar
9.0·10 9.0·10 9.0·10 9000 6.59 V
1 3 1
1.0·10 1.0·10 1.0·10 10 000 6.67 V
1 3 1 10 10
2.0·10 2.0·10 2.0·10 20 000 7.17 V
-2
1 3 1
U = — ( log 7·10 + 3) = — (-1.15 + 3) = 3.08 V
5.0·10 5.0·10 5.0·10 50 000 7.83 V
a
1 3 1
9.0·10 9.0·10 9.0·10 90 000 8.26 V
66
2 4 2 2
1.0·10 1.0·10 1.0·10 1.0·10 Torr 8.33 V
2 4 2 2
2.0·10 2.0·10 2.0·10 2.0·10 Torr 8.84 V
2 4 2 2
5.0·10 5.0·10 5.0·10 5.0·10 Torr 9.50 V
2 4
9.0·10 9.0·10 *) *) 9.92 V
3 5
1.0·10 1.0·10 -- -- 10.00 V
2
*) FS: 7.6·10 Torr � 9.8 V
21
Table 3 Display resolution and display increments
Pressure Increments Increments
[mbar / Torr] for STD for HIGH
-3
1.00·10
to in 0.1 increments in 0.1 increments
-2
1.00·10
to in 0.1 increments in 0.01 increments
-2
3.00·10
to in 0.1 increments in 0.02 increments
-2
6.00·10
to in 0.1 increments in 0.05 increments
-1
1.00·10
to in 0.1 increments in 0.01 increments
-1
3.00·10
to in 0.1 increments in 0.02 increments
-1
6.00·10
to in 0.1 increments in 0.05 increments
0
1.00·10
etc. in 0.1 increments in 0.01 increments
etc. in 0.1 increments in 0.02 increments
etc. to in 0.1 increments in 0.05 increments
1
9.90·10
1
9.95·10
2
1.00·10
to in 0.1 increments in 0.05 increments
2
2.00·10
to in0.1 increments in 0.1 increments
2
3.00·10
2
3.50·10
2
4.00·10
2
5.00·10
2
6.00·10
2 **)
8.00·10
3 **)
1.00·10
2
**) FS: 7.6·10 Torr
Table 4 Assignment: Measurement range, measurement uncertainty and switching hysteresis for the level trigger mode and standard resolution
mbar Pa Torr Micron Measurement Trigger-hysteresis
uncertainty Level trigger
-3 -3 -1 -1 -3 -3
1.0·10 to 4.9·10 1.0·10 to 4.9·10 1.0·10 to 4.9·10 1. 2. 3. 4 ± 20 % nicht einstellbar
-3 -3 -1 -1 -3 -3
5.0·10 to 9.9·10 5.0·10 to 9.9·10 5.0·10 to 9.9·10 5. 6. 7. 8. 9 ± 20 % + 20 %
-2 -2 0 0 -2 -2
1.0·10 to 9.9·10 1.0·10 to 9.9·10 1.0·10 to 9.9·10 10. 11. 12... 99 ± 15 % + 10 %
-1 -1 1 1 -1 -1
1.0·10 to 9.9·10 1.0·10 to 9.9·10 1.0·10 to 9.9·10 100. 110... 990 ± 15 % + 10 %
0 0 2 2 0 0
1.0·10 to 9.9·10 1.0·10 to 9.9·10 1.0·10 to 9.9·10 1000. 1100... 9900 ± 15 % + 10 %
1 1 3 3 1 1
1.0·10 to 9.9·10 1.0·10 to 9.9·10 1.0·10 to 9.9·10 10000. 11000... 99000 ± 15 % + 10 %
2 2 4 4 2 2 2 2
1.0·10 to 2.9·10 1.0·10 to 2.9·10 1.0·10 to 2.9·10 1.0·10 to 2.9·10 Torr ± 50 % + 20 %
2 4 2 2
3.0·10 3.0·10 3.0·10 3.0·10 Torr -- + 20 %
2 4 2 2
3.5·10 3.5·10 3.5·10 3.5·10 Torr -- + 20 %
2 4 2 2
4.0·10 4.0·10 4.0·10 4.0·10 Torr -- + 20 %
2 4 2 2
5.0·10 5.0·10 5.0·10 5.0·10 Torr -- cannot be set
2 4 2 2
6.0·10 6.0·10 6.0·10 6.0·10 Torr -- cannot be set
2 4 2 2
8.0·10 8.0·10 7.6·10 7.6·10 Torr -- cannot be set
3 5
1.0·10 1.0·10 -- -- -- cannot be set
Note
The smallest possible degree of switching hysteresis for
the interval trigger is + 5 % of the trigger level.
22
Example
2.10.2 Chart recorder ouput tables for PM
-3
p = 7·10 mbar
measurement channel
Table 5 Response of the chart recorder output, trigger relay and 10 10
ready indicator in the PM channel
-3
Ua = — ( log 7·10 + 9) = — (-2,155 + 9) = 9,78 V
PM channel PM- Trigger relay Chart
77
mode Ready operating recorder
contact contact output
AC power „OFF“ open open --
open 10.2 - 10.6 V
Immediately after open
-8
AC Power „ON“ Table 6 Table of examples for the PM chart recorder output at Ano .
open 10.2 - 10.6 V
Immediately after open mbar Pa Torr Chart rec.
„HV ON“ output volt.
-9 -7 -9
je nach Druck -0.2 - 10.2 V
Measurement value closed
1.0·10 1.0·10 1.0·10 0.00 V
-9
offen oder
-9 -7 -9
(p > 5·10 mbar) pre-
2.0·10 2.0·10 2.0·10 0.43 V
geschlossen
sent after 10 s. -9 -7 -9
5.0·10 5.0·10 5.0·10 1.00 V
-9 -7 -9
open 10.2 - 10.6 V 9.0·10 9.0·10 9.0·10 1.36 V
open
No measurement
-8 -6 -8
value present after
1.0·10 1.0·10 1.0·10 1.43 V
10 s
-8 -6 -8
2.0·10 2.0·10 2.0·10 1.86 V
-8 -6 -8
open -- 5.0·10 5.0·10 5.0·10 2.43 V
open
HV-Off
-8 -6 -8
9.0·10 9.0·10 9.0·10 2.79 V
Equations for the chart recorder output (Ua) relating to
-7 -5 -7
1.0·10 1.0·10 1.0·10 2.86 V
the PENNINGVAC measurement channel; see Table 6:
-7 -5 -7
2.0·10 2.0·10 2.0·10 3.29 V
-7 -5 -7
5.0·10 5.0·10 5.0·10 3.86 V
-8
For Ano
-7 -5 -7
9.0·10 9.0·10 9.0·10 4.22 V
10
-6 -4 -6
U = — ( log p + 9) 1.0·10 1.0·10 1.0·10 4.29 V
a
-6 -4 -6
7 2.0·10 2.0·10 2.0·10 4.72 V
-6 -4 -6
5.0·10 5.0·10 5.0·10 5.28 V
-2 -6 -4 -6
9.0·10 9.0·10 9.0·10 5.65 V
For Anl
-5 -3 -5
p
1.0·10 1.0·10 1.0·10 5.71 V
U = ——— 10
-5 -3 -5
a
2.0·10 2.0·10 2.0·10 6.14 V
p
max -5 -3 -5
5.0·10 5.0·10 5.0·10 6.71 V
-5 -3 -5
9.0·10 9.0·10 9.0·10 7.08 V
-3
For Anl
-4 -2 -4
1.0·10 1.0·10 1.0·10 7.14 V
p -4 -2 -4
2.0·10 2.0·10 2.0·10 7.57 V
U = ——— 100
a
-4 -2 -4
5.0·10 5.0·10 5.0·10 8.14 V
p
max
-4 -2 -4
9.0·10 9.0·10 9.0·10 8.51 V
-3 -1 -3
1.0·10 1.0·10 1.0·10 8.57 V
-4
For Anl
-3 -1 -3
2.0·10 2.0·10 2.0·10 9.00 V
p
-3 -1 -3
5.0·10 5.0·10 5.0·10 9.57 V
U = ——— 1 000
a
-3 -1 -3
9.0·10 9.0·10 9.0·10 9.93 V
p
max
-2 -2
1.0·10 1.0 1.0·10 10.00 V
-5
For Anl
p
U = ——— 10 000
a
p
max
-6
For Anl
p
U = ——— 100 000
a
p
max
-7
For Anl
p
U = ——— 1 000 000
a
p
max
U Chart recorder output voltage in V and U = 10 V
a a max
p Pressure in mbar or Torr
23
Table 7 Display resolution and display increments Table 8 Assignment: Measurement range, measurement uncertainty and swit-
ching hysteresis for the level trigger mode
Pressure Increments Increments
[mbar] for STD for HIGH mbar Pa Torr Measurement Trigger hysteresis
uncertainty Level trigger
-10
9.90·10
-10 -8 -10
to in 0.1 in 0.05 9.9·10 9.9·10 9.9·10 -- cannot be set
-9
1.00·10 -9 -7 -9
1.0·10 1.0·10 1.0·10
to in 0.1 in 0.01
to to to -- cannot be set
-9
3.00·10 -9 -7 -9
9.9·10 9.9·10 9.9·10
to in 0.1 increments in 0.02 increments
-8 -6 -8
1.0·10 1.0·10 1.0·10
-9
6.00·10
to to to–30 % + 20 %
to in 0.1 increments in 0.05 increments
-8 -6 -8
9.9·10 9.9·10 9.9·10
-8
1.00·10
-7 -5 -7
to in 0.1 increments in 0.01 increments 1.0·10 1.0·10 1.0·10
-8
to to to–30 % + 10 %
3.00·10
-5 -3 -5
to in 0.1 increments in 0.02 increments
9.9·10 9.9·10 9.9·10
-8
6.00·10
-4 -2 -4
1.0·10 1.0·10 1.0·10
to in 0.1 increments in 0.05 increments
to to to -- + 20 %
-7
1.00·10
-2 -0 -2
1.0·10 1.0·10 1.0·10
usw. in 0.1 increments in 0.01 increments
usw. in 0.1 increments in 0.02 increments
usw. to in 0.1 increments in 0.05 increments
-3
1.00·10
to in 0.1 increments in 0.1 increments
-3
6.00·10
to in 0.2 increments in 0.2 increments
-2
1.00·10
24
3 RS 232 C interface
3.1 Description
3.2 Interface parameters
The levels of the RS 232 C interface are defined as fol-
3.2.1 Baud rate
lows:
The baud rate is fixed to 2400 baud.
Level LOW (L) HIGH (H)
————————————————————————
Voltage range -3 to -25 V 3 to 25 V
Logic state logic 1 logic 0
3.2.2 Data format
Level designation Mark Space
The data format is fixed to:
The interface may be operated in either of the following
1 start bit, 7 data bits + 1 space, 1 stop bit.
modes:
A parity bit is not generated and no parity check is run on
Printer mode
received data.
In this mode the data are output every 10 s via the inter-
face. The instrument itself and the entry of parameters is
controlled via the keyboard. 3.2.3 End and acknowledgement character
for remote operation
Remote control mode
Upon request (after having received the first character)
The character
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