High-Temperature Radiant Burner IMPACTS ITP Development Eliminates Global Overview Warming Gas In Semiconductor Manufacturing u Developed by Alzeta Corporation The high-temperature radiant burner developed by Alzeta with ITP assistance, u Commercialized in 1995 forms the core of a thermal processing unit that destroys up to 99.9% of one of the most potent classes of global warming gases known – the perfluorocarbons u Over 5,000 burners sold in the United (PFCs). PFCs, which include C F and difficult-to-destroy CF , are generated 2 6 4 States during the semiconductor manufacturing process. PFCs are among the most potent greenhouse gases known, having high global warming potential and Energy Savings extremely long atmospheric lifetimes. For example, C F has a warming 2 6 potential 9,200 times that of CO and an atmospheric lifetime of 10,000 years. (Trillion Btu) 2 The long lifetime means that even small emissions will contribute to the Cumulative through 2004 2004 cumulative atmospheric global warming burden that will persist for thousands 9.47 2.19 of years. The PFC destruction system, the TPU 4200, received a “best products” award from Semiconductor International magazine and is sold by Emissions Reductions Edwards High Vacuum International. Edwards selected the Alzeta burner for its ability to operate reliably at high process temperatures and provide uniform, (Thousand Tons, 2004) well controlled heat. The TPU 4200 is placed downstream of semiconductor Particulates SO NO Carbon X X wafer etching “tools” made by Applied Materials and Novellus. Because plants 0.0 0.0 0.256 34.8 have multiple tools to serve multiple production lines, several TPU 4200 units are generally installed in each plant. TPU 4200 customers include well known Applications companies such as Advanced Micro Devices, Hewlett Packard, and Motorola, as well as several manufacturers in Japan. u Adiabatic thermal oxidizers for destroying hazardous volatile organic compounds u Gas-fired boilers, paper dryers, refineries (asphalt heating), and plastics manufacturing (resin drying) u Other boilers, furnaces, dryers, and combustion equipment applications Capabilities u Can operate reliably with higher-than- normal process temperatures. u Has uniform and well-controlled heat flux. Benefits Ease of Installation Manufactured in standard-size cylindrical segments to facilitate shipping and installation. Pollution Control Reduces NO emissions by up to 80%. X Productivity Reduces maintenance and associated downtime in applications that require handling of hazardous gases. Increases productivity in paper drying by increasing High-Temperature Radiant Burner energy delivered to drying drums.  DOE Industrial Technologies Program